Surface-Micromachined Mirrors

  • Robert Conant
Part of the The Springer International Series in Microsystems book series (MICT, volume 12)

Abstract

Surface micromachining is a set of fabrication processes derived from planar integrated-circuit fabrication technologies that have been adapted to make free-standing mechanical structures. Surface micromachined devices were made in the late 1960’s by Nathanson [31], and the foundations for the polysilicon surface-micromachining process were laid by Muller and Howe in 1982 [32]. Steps in the fabrication process include, but are not limited to:

Keywords

Resonant Frequency Dynamic Deformation Comb Drive Mirror Position Coupling Linkage 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

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Copyright information

© Springer Science+Business Media New York 2003

Authors and Affiliations

  • Robert Conant

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