Abstract
Surface micromachining is a set of fabrication processes derived from planar integrated-circuit fabrication technologies that have been adapted to make free-standing mechanical structures. Surface micromachined devices were made in the late 1960’s by Nathanson [31], and the foundations for the polysilicon surface-micromachining process were laid by Muller and Howe in 1982 [32]. Steps in the fabrication process include, but are not limited to:
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© 2003 Springer Science+Business Media New York
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Conant, R. (2003). Surface-Micromachined Mirrors. In: Micromachined Mirrors. The Springer International Series in Microsystems, vol 12. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-3764-6_3
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DOI: https://doi.org/10.1007/978-1-4757-3764-6_3
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4419-5325-4
Online ISBN: 978-1-4757-3764-6
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