Abstract
An automated EBSD system is a combination of hardware and software designed to operate in harmony. The hardware combines pattern acquisition using a specialized camera and electron image acquisition from the SEM. The software controls data acquisition and processing. The standard SEM image may be used as a reference image, or better, that produced by a dedicated forward scattered electron detector. Examples of the use of the camera, image and EBSD data are given to illustrate the Oxford Instruments EBSD system capabilities.
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Reference
Randle, V., 1998, Data presentation and analysis for electron backscatter diffraction, Oxford Instruments Application note.
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© 2000 Springer Science+Business Media New York
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Rolland, P., Dicks, K.G. (2000). An Automated EBSD Acquisition and Processing System. In: Schwartz, A.J., Kumar, M., Adams, B.L. (eds) Electron Backscatter Diffraction in Materials Science. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-3205-4_12
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DOI: https://doi.org/10.1007/978-1-4757-3205-4_12
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4757-3207-8
Online ISBN: 978-1-4757-3205-4
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