Abstract
In this chapter we will present a concept for implementing smart sensor interfaces [1]. Within the scope of this work we cannot discuss many types of sensors or sensor interfaces, hence we limit ourselves to two common sensor types, for measuring temperature, and for measuring pressure. This limitation does not mean that the presented matter cannot be extended to other types of sensors.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
J.H. Huijsing, F.R. Riedijk, and G. v.d. Horn, “Developments in integrated smart sensors”, Sensors and Actuators A, Vol. 43, 1994, pp. 276–288.
G.C.M. Meijer, “Thermal sensors based on transistors”, Sensors and Actuators, Vol.10, 1986, pp. 103–125.
G.C.M. Meijer and A.W. van Herwaarden, Thermal Sensors, Institute of Physics Publishing, Bristol/Philadelphia, 1994.
S. Middelhoek and S.A. Audet, Silicon Sensors, Academic Press, London, 1989.
R.F. Wolffenbuttel, “Fabrication compatibility of integrated silicon smart physical sensors, Sensors and Actuators A, Vol. 41–42, 1994, pp. 1–28.
K.D. Wise and N. Najafi, “The coming opportunities in microsensor systems”, Proceedings Transducers 1991,San Fransisco, USA, PP.1–7.
J. Bryzek, K. Petersen, J.R. Mallon, L. Christel, F. Pourahmadi, Silicon Sensors and Microstructures, NovaSensor, Fremont, USA, 1990.
J.H. Huijsing, “Signal conditioning on the sensor chip”, Sensors and Actuators, Vol. 10, 1986, pp. 219–237.
R. Frank, “Pressure sensors merge micromachining and microelectronics”, Sensors and Actuators A, Vol. 28, 1991, pp. 93–103.
L.K. Nanver, E.J.G. Goudena, and H.W. van Zeijl, “Dimes-01, A base-line bifet process for smart sensor experiments”, Sensors and Actuators A, Vol. 36, 1993, pp. 139–147.
R.P. van Kampen, Bulk-Micromachined Capacitive Servoccelerometer, PhD Thesis, Delft University Press, Delft, 1995.
F. Schnatz et al., “Smart CMOS capacitive pressure transducer with on-chip calibration capability”, Sensors and Actuators A, Vol. 34, 1992, pp. 77–83.
C. Sander, J.W. Knutti, and J. Meindl, “A monolithic capacitive pressure transducer with pulse-period output”, IEEE Trans. Electron Devices, Vol. ED-29, 1980, pp. 42–48.
L.S. Lee and K.D. Wise, “A batch-fabricated silicon capacitive pressure transducer with low temperature sensitivity”, IEEE Trans. Electron Devices, Vol. ED-29, 1982, pp. 42–48.
T. Rogers and J. Kowal, “Selection of glass, anodic bonding conditions and material compatibility for silicon-glass capacitive sensors”, Sensors and Actuators A, Vol. 46–47, 1995, pp. 113–120.
S. Ansermet, D. Otter, R.W. Craddock and J.L. Dancester, “Cooperative development of a piezoresistive pressure sensor with integrated signal conditioning for automotive and industrial applications”, Sensors and Actuators A, Vol. 21–23, 1990, pp. 79–83.
D. Tandeske, Pressure Sensors: selection and application, Marcel Dekker Inc., New York, 1991.
Y. Kanda, “piezoresistance effect of silicon”, Sensors and Actuators A, Vol. 28, 1991, pp. 83–91.
S. Kim and K.D. Wise, “Temperature sensitivity in silicon piezoresistive pressure transducers”, IEEE Trans. Electron Devices, Vol. ED-38, 1983, pp. 802–810.
M. Gunawan, G.C.M. Meijer, J. Fonderie, and J.H. Huijsing, “A curvature-corrected low-voltage bandgap reference”, IEEE Journal of Solid-State Circuits, Vol. 28, No. 6, 1993, pp. 667–670.
L.G. Fasoli, F.R. Riedijk, and J.H. Huijsing, “A general circuit for resistive bridge sensors with bus compatible output”, Proceedings IMTC’96, June 1996, pp. 1205–1210.
R. v.d. Plassche, Integrated Analog-to-Digital and Digital-to-Analog Converters, Kluwer Academic Publishers, Boston/Dordrecht/ London, 1994.
P.R. Gray, B.A. Wooley, and R.W. Brodersen, edits., Analog MOS Integrated Circuits II, IEEE press, 1988.
J.C. Candy and G.C. Temes, Oversampled Delta-Sigma Data Converters, IEEE Press, New York, 1992.
F.R. Riedijk, Integrated Smart Sensors with Digital Bus Interface, PhD Thesis, Delft University Press, Delft, 1993.
B.E. Boser, Design and implementation of oversampled analog-todigital converters, PhD Thesis, Stanford University, 1989.
P.J.A. Naus and E.C. Dijkmans, “Low signal-level distortion in sigma-delta modulators”
O. Feely and L.O. Chua, “The effect of integrator leak in sigma-delta Modulation”, IEEE Trans. Circuits and Systems, Vol. 38, No. 11, November 1991, pp. 1293–1306.
R.W. Adams, “Design and implementation of an audio 18-bit analog-to-digital converter using oversampling techniques”, J. Audio Eng. Soc., Vol. 34, No. 3, March 1986, pp. 153–166.
A.W. van Herwaarden and R.F. Wolffenbuttel, “Introduction to sensors compatible with microprocessors”, Microprocessors and Microsystems, Vol. 14, No. 2, 1990, pp. 72–82.
E.J. Hogenbirk, H.J. Verhoeven, F.R. Riedijk, and J.H. Huijsing, “an integrated smart sensor for flow and temperature with i2c bus interface based on thermal sigma-delta modulation”, Proceedings Transducers 1993,Yokohama, Japan, pp.792–795.
J.H. Huijsing, R.F. Tuk, F.R. Riedijk, M. Bredius, and G. v.d. Horn, Mixed Analog/Digital Two-Line Bus System, Dutch Patent Application, Nr.93201595–1, June 1993.
F.R. Riedijk R.F. Tuk, M. Bredius, and J.H. Huijsing, “A bus-controlled interface environment for an accurate read-out and flexible interconnection of integrated smart sensors in local systems”, Proceedings Transducers 1993,Yokohama, Japan, pp.327–330.
M. Bredius, F.R. Riedijk, G. v.d. Horn, and J.H. Huijsing, “The Integrated Smart Sensor (IS2) bus”, Proceedings Sensor Expo West, Philadelphia, USA, 1993, pp. 243–247.
F.R. Riedijk and J.H. Huijsing, “Sensor interface environment based on sigma-delta conversion and serial bus interface”, SENSORS, journal of applied sensing technology, Sensors Expo issue, April 1996.
F.M.L. van der Goes and G.C.M. Meijer, “A novel low-cost and accurate multi-purpose sensor interface with continuous auto-calibration”, Proceedings IMTC’96, June 1996, pp. 782–786.
P.C. de Jong and G.C.M. Meijer, “Absolute voltage amplification using dynamic feedback control”, Proceedings IMTC’96, June 1996, pp. 67–71.
Author information
Authors and Affiliations
Rights and permissions
Copyright information
© 1998 Springer Science+Business Media Dordrecht
About this chapter
Cite this chapter
van der Horn, G., Huijsing, J.L. (1998). Integrated Smart Sensor Concept. In: Integrated Smart Sensors. The Springer International Series in Engineering and Computer Science, vol 419. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-2890-3_2
Download citation
DOI: https://doi.org/10.1007/978-1-4757-2890-3_2
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4419-5016-1
Online ISBN: 978-1-4757-2890-3
eBook Packages: Springer Book Archive