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The SOI MOSFET

  • Chapter
Silicon-on-Insulator Technology: Materials to VLSI

Abstract

Although most types of devices can be fabricated in SOI films, the preferred application field for Silicon-on-Insulator technology is undeniably CMOS. Other types of devices (bipolar devices, novel devices, etc.) will be reviewed in Chapter 6. SOI MOSFETs exhibit interesting properties which make them particularly attractive for applications such as rad-hard circuits, deep-submicron devices and high-temperature electronics. The properties of the SOI MOSFET operating in a harsh environment will be described in Chapter 7.

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    Jean-Pierre Colinge

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Colinge, JP. (1997). The SOI MOSFET. In: Silicon-on-Insulator Technology: Materials to VLSI. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-2611-4_5

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