Skip to main content

Integrated Sensor Systems in CMOS Technology

  • Chapter
Analog Circuit Design

Abstract

In this contribution we discuss the tundamental issues ot designing and building integrated sensor systems in CMOS technology.

This is a preview of subscription content, log in via an institution to check access.

Access this chapter

Chapter
USD 29.95
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
eBook
USD 129.00
Price excludes VAT (USA)
  • Available as PDF
  • Read on any device
  • Instant download
  • Own it forever
Softcover Book
USD 169.99
Price excludes VAT (USA)
  • Compact, lightweight edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info
Hardcover Book
USD 169.99
Price excludes VAT (USA)
  • Durable hardcover edition
  • Dispatched in 3 to 5 business days
  • Free shipping worldwide - see info

Tax calculation will be finalised at checkout

Purchases are for personal use only

Institutional subscriptions

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. H. Komiya, “Future technological and economic prospects for VLSI”, Digest of Techn. Papers IEEE Int. Solid-State Circ. Conf. (ISSCC ‘93), San Francisco (Cal.), pp. 16–19, Febr. 1993.

    Google Scholar 

  2. B. J. Hosticka, “Circuit and system design for silicon microsensors”, Proc. IEEE Int. Symp. on Circuits and Systems (ISCAS ‘92), San Diego (Cal.), vol. 4, pp. 1824–1827, Mai 1992.

    Google Scholar 

  3. K. D. Wise, “Micromechanical systems: Interfacing electronics to a non-electronic world”, Digest of Techn. Papers IEEE Int. Electron Devices Meeting (IEDM ‘96), San Francisco (Cal.), pp. 11–18, Dec. 1996.

    Chapter  Google Scholar 

  4. H. Baltes, O. Paul, J. G. Korvinck, M. Schneider, J. Bühler, N. Scheeberger, D. Jaeggi, P. Malcovati, M. Hornung, A. Häberli, M. von Arx, F. Mayer, and J. Funk, “IC MEMS transducers”, Digest of Techn. Papers IEEE Int. Electron Devices Meeting (IEDM ‘96), San Francisco (Cal.), pp. 521–524, Dec. 1996

    Google Scholar 

  5. M. Schanz, W. Brockherde, B.J. Hosticka, and R. Klinke, “A CMOS linear image sensor array with on-chip programmable signal processing”, Proc. 21st European Solid-State Circuits Conference (ESSCIRC ‘95), Lille (France), pp. 242–245, Sept. 1995.

    Google Scholar 

  6. R. Hauschild, B. J. Hosticka, S. Müller, and M. Schwarz, “A CMOS optical sensor system performing image sampling on a hexagonal grid”, Proc. 22nd European Solid-State Circuits Conference (ESSCIRC’96), Neuchâtel (Switzerland), pp. 304–307, Sept. 1996.

    Google Scholar 

  7. S. Ulbricht, W. Budde, R. Gottfried-Gottfried, R. Jähne, B. Sauer, and U. Wende, “A mono-lithically integrated two-axis magnetic field sensor system”, Proc. 22nd European Solid-State Circuits Conference (ESSCIRC’96), Neuchâtel (Switzerland), pp. 132–135, Sept. 1996.

    Google Scholar 

  8. R. Jähne, W. Budde, R. Gottfried-Gottfried, H. Kück, and M. Müller, “Monolithic infrared sensor system with programmable readout electronics”, Proc. 20th European Solid-State Circuits Conference (ESSCIRC ‘94), Ulm (Germany), pp. 292–295, Sept. 1994.

    Google Scholar 

  9. U. Schöneberg, H. G. Dura, B. J. Hosticka, and W. Mokwa, “Low-drift gas sensor with on-chip instrumentation”, Dig. of. Techn. Papers IEEE Int. Conf. on Solid-State Sensors and Actuators (TRANSDUCERs 91), San Francisco (Cal.), pp. 1006–1007, June 1991.

    Google Scholar 

  10. W. Mokwa, “Silicon technologies for sensor fabrication”, in Chemical Sensor Technology (Ed. S. Yamauchi), vol. 4, pp. 43–62, Kodansha Ltd. , Tokyo (Japan), 1992.

    Google Scholar 

  11. O. Machul, D. Hammerschmidt, W. Brockherde, B. J. Hosticka, E. Obermeier, and P. Krause, “A smart pressure transducer with on-chip readout, calibration and nonlinear temperature compensation based on spline-functions”, Digest of Techn. Papers IEEE Int. Solid-State Circ. Conf. (ISSCC ‘97), San Francisco (Cal.), pp. 198–199, Febr. 1997.

    Google Scholar 

  12. R. S. Payne, S. Sherman, S. Lewis, and R. T. Howe, “Surface micromachining: From vision to reality to vision”, Digest of Techn. Papers IEEE Int. Solid-State Circ. Conf. (ISSCC ‘95), San Francisco (Cal.), pp. 164–165, Febr. 1995.

    Google Scholar 

Download references

Author information

Authors and Affiliations

Authors

Editor information

Editors and Affiliations

Rights and permissions

Reprints and permissions

Copyright information

© 1997 Springer Science+Business Media Dordrecht

About this chapter

Cite this chapter

Hosticka, B.J. (1997). Integrated Sensor Systems in CMOS Technology. In: van de Plassche, R.J., Huijsing, H.H., Sansen, W. (eds) Analog Circuit Design. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-2602-2_11

Download citation

  • DOI: https://doi.org/10.1007/978-1-4757-2602-2_11

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4419-5185-4

  • Online ISBN: 978-1-4757-2602-2

  • eBook Packages: Springer Book Archive

Publish with us

Policies and ethics