Inelastic Scattering and Beam Damage

  • David B. Williams
  • C. Barry Carter


In the previous chapter, we discussed elastic scattering of the electron beam in which the incident electron lost no energy as it interacted with the specimen. Inelastic or energy-loss electrons are equally important and we’ll discuss the processes here, but leave the applications till later. Why are we interested in inelastic scatter? Well, inelastic scattering generates a whole range of signals, each of which can tell us more about the specimen than we can find out from the elastic electrons. The most important signals are the X-rays, inelastic electrons, and secondary electrons, and so we’ll emphasize how these signals arise. We will also discuss why these specific signals are useful to materials scientists.


Beam Energy Inelastic Scattering Auger Electron Ionization Cross Section Inelastic Process 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer Science+Business Media New York 1996

Authors and Affiliations

  • David B. Williams
    • 1
  • C. Barry Carter
    • 2
  1. 1.Lehigh UniversityBethlehemUSA
  2. 2.University of MinnesotaMinneapolisUSA

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