Spatial Resolution and Minimum Detectability

  • David B. Williams
  • C. Barry Carter


Often, when you do X-ray microanalysis of thin foils, you are seeking information that is close to the limits of spatial resolution. Before you carry out any such microanalysis you need to understand the various controlling factors, which we explain in this chapter. Minimizing your specimen thickness is perhaps the most critical aspect of obtaining the best spatial resolution, so we summarize the various ways you can measure your foil thickness at the analysis point.


Thin Foil Specimen Thickness Foil Thickness Good Spatial Resolution Thin Specimen 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer Science+Business Media New York 1996

Authors and Affiliations

  • David B. Williams
    • 1
  • C. Barry Carter
    • 2
  1. 1.Lehigh UniversityBethlehemUSA
  2. 2.University of MinnesotaMinneapolisUSA

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