The XEDS-TEM Interface

  • David B. Williams
  • C. Barry Carter


In principle, all you have to do to create an AEM is to hang an XEDS detector on the side of a TEM. However, in practice it isn’t always that simple because the TEM is designed primarily as an imaging tool, and microanalysis requires different design criteria. The AEM illumination system and specimen stage are rich sources of radiation, not all of it by any means coming from the area of interest in your specimen. So you have to take precautions to ensure that the X-ray spectrum you record comes from the area you chose and can ultimately be converted to quantitative elemental information. You therefore need to understand the problems associated with the XEDS-TEM interface and find ways to maximize the useful data. We describe several tests you should perform to ensure that the XEDS-TEM interface is optimized.


Thin Specimen System Peak Collection Angle Coherent Bremsstrahlung Hole Count 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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General References

  1. Goldstein, J.I. (1979) in Introduction to Analytical Electron Microscopy (Eds. J.J. Hren, J.I. Goldstein, and D.C. Joy), p. 83, Plenum Press, New York.Google Scholar
  2. Goldstein, J.I., Williams, D.B., and Fiori, C.E. (1986) in Principles of Analytical Electron Microscopy (Eds. D.C. Joy, A.D. Romig Jr., and J.I. Goldstein), p. 123, Plenum Press, New York.Google Scholar
  3. Williams, D.B. (1987) Practical Analytical Electron Microscopy in Materials Science, 2nd Edition. Philips Electron Optics Publishing Group, Mahwah, New Jersey.Google Scholar
  4. Zaluzec, N.J. (1979) in Introduction to Analytical Electron Microscopy (Eds. J.J. Hren J.I. Goldstein, and D.C. Joy), p. 121, Plenum Press, New York.Google Scholar

Specific References

  1. Allard, L.F. and Blake, D.F. (1982) in Microbeam Analysis-1982 (Ed. K.F.J. Heinrich), p. 8, San Francisco Press, San Francisco. Cliff, G. and Kenway, P.B., ibid.,p, 107.Google Scholar
  2. Fiori, C.E., Swyt, C.R., and Ellis, J.R., ibid.,p. 57.Google Scholar
  3. Goldstein, J.I. and Williams, D.B. (1978) in SEM-1978 1, (Ed. O. Johari), p. 427, SEM Inc., AMF O’Hare, Illinois.Google Scholar
  4. Lyman, C.E., and Ackland, D.W. (1991) in Proceedings of 49th EMSA Meeting (Ed. G.W. Bailey and E.L. Hall), p. 720, San Francisco Press, San Francisco.Google Scholar
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  6. Reese, G.M., Spence, J.C.H., and Yamamoto, N. (1984) Phil. Mag. A49, 697.CrossRefGoogle Scholar
  7. Williams, D.B. and Goldstein, J.I. (1981) in Energy Dispersive X-ray Spectrometry (Eds. K.F.J. Heinrich, D.E. Newbury, R.L. Myklebust, and C.E. Fiori), p. 341, NBS Special Publication 604, U.S. Department of Commerce/NBS, Washington, DC.Google Scholar
  8. Zemyan, S.M. and Williams, D.B. (1994) J. Microsc. 174, 1.CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media New York 1996

Authors and Affiliations

  • David B. Williams
    • 1
  • C. Barry Carter
    • 2
  1. 1.Lehigh UniversityBethlehemUSA
  2. 2.University of MinnesotaMinneapolisUSA

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