Abstract
This paper discusses current worldwide efforts aimed at the development of integrated microinstrumentation systems. Such systems are merging sensors, actuators, analog interface circuits, and embedded microcontrollers on common substrates to implement distributed measurement/control functions that are able to respond to a variety of conditions and which fit into a hierarchical control structure. Digital compensation of offset, slope, and temperature sensitivities appears capable of extending the precision of such systems by an order of magnitude or more provided the analog front-end is stable over time. While linearity is becoming less important in such systems, low-noise, low power, and small layout area continue to be key design goals. New force-balanced, resonant, and tunneling operating modes are largely unexplored in terms of integrated readout circuitry. In addition, the development of analog self-test and autocalibration procedures along with improved compensation protocols and test strategies offer many new challenges. Examples of highly-integrated analog front-ends for such systems are given in three areas: integrated circuitry for exploring neural networks at the cellular level, an integrated microflowmeter offering over 10 bits of accuracy and 16 hits of dynamic range, and an integrated gas analyzer based on ultrathin sensing films and precise temperature control. All of these devices are partially or fully self-testing.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
J. D. Meindl, V. K. De, B. Agrawal, “Prospects for Gigascale Integration (GSI) Beyond 2003,” Digest IEEE Solid-State Circuits Conf., pp. 124–125, February 1993.
K. E. Petersen, “Silicon as a Mechanical Material,” Proc. IEEE, 70, pp. 420–457, May 1982.
R. T. Howe, “Surface Micromachining for Microsensors and Microactuators,” J. Vac. Sci. Technol. B, 6, pp. 1809–1813, November/December 1988.
Y. B. Gianchandani and K. Najafi, “A Bulk Silicon Dissolved Wafer Process for Microelectromechanical Devices,” J. Microelectromechanical Systems, 1, pp. 77–85, June 1992.
R. T. Howe and R. S. Muller, “Resonant-Microbridge Vapor Sensor,” IEEE Trans. Electron Devices, 33, pp. 499–506, April 1986.
M. Mehregany and Y.-C. Tai, “Surface Micromachined Mechanisms and Micromotors,” J. Micromechanics and Microengr., 1, pp. 73–85, June 1991.
K. D. Wise and K. Najafi, “Microfabrication Techniques for Integrated Sensors and Microsystems,” (Invited), Science, 254, pp. 1335–1342, November 29, 1991.
K. D. Wise and N. Najafi, “The Coming Opportunities in Microsensor Systems,” (Invited), Digest IEEE Int. Conf. on Solid-State Sensors and Actuators, San Francisco, pp. 2–7, June 1991.
S. K. Clark and K. D. Wise, “Pressure Sensitivity in AnisotropicallyEtched Thin-Diaphragm Pressure Sensors,” IEEE Trans. Electron Devices, 26, pp. 1887–1896, December 1979.
S. Sugiyama, M. Takigawa, and I. Igarashi, “Integrated Piezoresistive Pressure Sensor with both Voltage and Frequency Output,” Sensors and Actuators, pp. 113–120, September 1983.
K. Yamada, M. Nishihara, R. Kanzawa, and R. Kobayashi, “A Piezoresistive Integrated Pressure Sensor,” Sensors and Actuators, 4, pp. 63–70, September 1983.
S. T. Cho and K. D. Wise, “A High-Performance with Built-in Self-Test,” Sensors and Actuators,published.
E. Yoon and K. D. Wise, “An Integrated Mass Flow Chip CMOS Interface Circuitry,” IEEE Trans. Electron 1376–1386, June 1992. Microflowmeter A, 1993, to be Sensor with On- Devices, 39,pp.
D. W. deBruin, H. V. Allen, and S. C. Terry, “Second-Order Effects in Self-Testable Accelerometers,” Digest IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, S.C., pp. 149–152, June 1990.
P. Bergveld, private communication with the author.
N. Najafi and K. D. Wise, “An Organization and Interface for Sensor-Driven Semiconductor Process Control Systems,” IEEE Journal of Semiconductor Manufacturing, pp. 230–238, November 1990.
S. B. Crary, W. G. Baer, J. C. Cowles, and K. D. Wise, “Digital Compensation of High-Performance Silicon Pressure Transducers,” Sensors and Actuators, A21, pp. 70–72, February 1990.
D. Hammerschmidt, F. V. Schnatz, W. Brockherde, B. J. Hosticka, and E. Obermeier, “A CMOS Piezoresistive Pressure Sensor with On-Chip Programming and Calibration,” Digest IEEE Solid-State Circuits Conf., pp. 128–129, February 1993.
Samaun, K. D. Wise, and J. B. Angell, “An IC Piezoresistive Pressure Sensor for Biomedical Instrumentation,” IEEE Trans. Biomed. Engr., 20, pp. 101–109, March 1973.
T. Nagata, H. Terabe, S. Kuwahara, S. Sakurai, O. Tabata, S. Sugiyama, and M. Esashi, “Digital Compensated Capacitive Pressure Sensor using CMOS Technology for Low-Pressure Measurements,” Sensors and Actuators, A, 34, pp. 173–177, August 1992.
M. J. S. Smith, L. Bowman, and J. D. Meindl, “Analysis, Design, and Performance of Micropower Circuits for a Capacitive Pressure Sensor IC,” IEEE Journal of Solid-State Circuits, 21, pp. 1045–1056, December 1986.
W. Yun, R. T. Howe, and P. R. Gray, “Surface Micromachined Digitally Force-Balanced Accelerometer with Integrated CMOS Detection Circuitry,” Digest IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, S.C., pp. 126–131, June 1992.
K. Ikeda, H. Kuwayama, T. Kobayashi, T. Watanabe, T. Nishikawa, T. Yoshida, and K. Harada, “Three-Dimensional Micromachining of Silicon Pressure Sensor Integrating Resonant Strain Gauge on Diaphragm,” Sensors and Actuators, A23, pp. 1007–1010, April 1990.
H. Guckel, C. Rypstat, M. Nesnidal, J. D. Zook, D. W. Bums, and D. K. Arch, “Polysilicon Resonant Microbeam Technology for High-Performance Sensor Applications,” Digest IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, S.C., pp. 153–156, June 1992.
T. W. Kenny, W. J. Kaiser, J. A. Podosek, H. K. Rockstad, and J. K. Reynolds, “Micromachined Electron Tunneling Infrared Sensors,” Digest IEEE Solid-State Sensor and Actuator Workshop, Hilton Head, S.C., pp. 174–177, June 1992.
J. Ji and K. D. Wise, “An Implantable CMOS Circuit Interface for Multiplexed Microelectrode Recording Arrays,” IEEE Journal of Solid-State Circuits, 27, pp. 433–443, March 1992.
S. T. Cho, K. Najafi, C. E. Lowman, and K. D. Wise, “An Ultrasensitive Silicon Pressure-Based Microflow Sensor,” IEEE Trans. Electron Devices, 39, pp. 825–835, April 1992.
N. Najafi, K. D. Wise, R. Merchant, and J. W. Schwank, “An Integrated Multi-Element Ultra-Thin-Film Gas Analyzer, Digest IEEE Solid-State Sensor and Actuator Workshop, pp. 19–22, June 1992.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1994 Springer Science+Business Media Dordrecht
About this chapter
Cite this chapter
Wise, K.D. (1994). Analog Data Acquisition Circuits in Integrated Sensing Systems. In: Sansen, W., Huijsing, J.H., Van de Plassche, R.J. (eds) Analog Circuit Design. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-2310-6_8
Download citation
DOI: https://doi.org/10.1007/978-1-4757-2310-6_8
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4419-5138-0
Online ISBN: 978-1-4757-2310-6
eBook Packages: Springer Book Archive