Defect Statistics

  • Duncan Moore Henry Walker
Part of the The Springer International Series in Engineering and Computer Science book series (SECS, volume 33)


In this chapter we describe the statistical distributions used to model how the defects described in Chapter 3 occur on a chip. Local defects can be characterized by a spatial distribution and a size distribution. The spatial distribution describes how defects are distributed across lots, wafers, and chips. The size distribution describes how the defect diameter varies.


Radial Distribution Defect Density Defect Statistics Defect Type Negative Binomial Distribution 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


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Copyright information

© Springer Science+Business Media Dordrecht 1987

Authors and Affiliations

  • Duncan Moore Henry Walker
    • 1
  1. 1.Carnegie Mellon UniversityUSA

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