Abstract
In this chapter we describe the statistical distributions used to model how the defects described in Chapter 3 occur on a chip. Local defects can be characterized by a spatial distribution and a size distribution. The spatial distribution describes how defects are distributed across lots, wafers, and chips. The size distribution describes how the defect diameter varies.
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© 1987 Springer Science+Business Media Dordrecht
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Walker, D.M.H. (1987). Defect Statistics. In: Yield Simulation for Integrated Circuits. The Springer International Series in Engineering and Computer Science, vol 33. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-1931-4_4
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DOI: https://doi.org/10.1007/978-1-4757-1931-4_4
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4419-5201-1
Online ISBN: 978-1-4757-1931-4
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