The Application of TiC and TiN Thick Films by PVD Processes

  • K. Nakamura
  • Y. Fukube
  • K. Inagawa
  • Y. Nozawa

Abstract

Recently, several processes of physical vapor deposition have been developed to obtain hard refractory carbide and nitride films. Reactive sputtering(1), activated reactive evaporation with a probe electrode and grounded substrate (A R E)(2) and activated reactive evaporation with a biased substrate (Low Pressure Plasma Deposition: L PP D) were successfully used to produce TiC and TiN thick films. This paper describes the examination of these films coated on the steel plate and the WC-Co cemented carbide throw away tips by latter two processes, and also describes the distinctive feature of TiC thick films for corrosion resistance to molten Aluminum.

Keywords

Flank Wear High Substrate Temperature Crater Depth Reactive Evaporation Constant Evaporation Rate 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.

Preview

Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

References

  1. 1.
    Nakamura, K., Shinoki, F., Ito, A. Preparation of TiC Film by RF Reactive Sputtering. Journal of the Japan Institute of Metals, Vol. 38, No. 10, 1974, pp 913–919.Google Scholar
  2. 2.
    Bunshah, R. F., Raghuran, A. C., Activated Reactive Evaporation for High Rate Deposition of Compounds, Journal of Varuum Science and Technology, Vol. 9, No. 6, 1972, pp 1385–1388.CrossRefGoogle Scholar
  3. 3.
    Raghrun, A. C., Bunshah, The Effect of Substrate Temperature on the Structure of Titanium Carbide Deposited by Activated Reactive Evaporation, Journal of Vacuum Science and Technology, Vol. 9, No. 6, 1972, pp 1389–1394.CrossRefGoogle Scholar

Copyright information

© Springer Science+Business Media New York 1982

Authors and Affiliations

  • K. Nakamura
    • 1
  • Y. Fukube
    • 1
  • K. Inagawa
    • 1
  • Y. Nozawa
    • 1
  1. 1.Institute for Super MaterialsULVAC Corporation 523 Yokota SambuchoSambu-gu, Chiba-PrefJapan

Personalised recommendations