Abstract
Most samples are in the form of a slab or a thin film on a slab. We first review the optical properties of such samples described only by a complex index of refraction ñ = (n + ik). Later, we will determine the origin of n and k in a semiconductor so that we may characterize it in terms of free-carrier density, mobility, donor and acceptor densities, alloy homogeneity, etc.
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References
H. Wolter, in Handbuch der Physik, edited by S. Flugge ( Springer, Berlin, 1956 ), p. 461.
P. H. Berning in Physics of Thin Films, edited by G. Hass, Vol. 1, p. 69, Academic (1963).
S. Heavens, Optical Properties of Thin Films, Dover (1965).
A. Vasicek, Optics of Thin Films, North Holland (1960).
F. Abeles, in Progress in Optics, Vol. II edited by E. Wolf,p.251 North Holland (1963).
H.Y. Fan, Repts. Prog. Phys. 19, 107 (1956).
T. S. Moss, Optical Properties of Semiconductors, Academic (1959).
L. Harris, J. K. Beasley and A. L. Loeb, J. Opt. Soc. Am. 41, 604 (1951).
H. B. Rosenstock (Private Communication).
C. Hilsum, J. Opt. Soc. Am. 44, 181 (1954).
F. Bassani and G. Pastori Parravicini, Electronic States and Optical Transitions in Solids, Pergamon (1975).
E. Johnson, in Semiconductors and Semimetals, edited by R.K. Willardson and A.C. Beer, Vol. 3, p. 153, Academic (1967).
E.D. Palik and D. L. Mitchel, in Physics of Solids in Intense Magnetic Fields, edited by E.D. Haidemenakis, p. 90, Plenum (1969).
F. Stern, Phys. Rev. 133, A1653 (1964).
R. W. Christy, Am. J. Phys. 40, 1403 (1972).
S. S. Mitra, in Optical Properties of Solids, p. 333 Plenum (1969).
W. G. Spitzer, in Semiconductors and Semimetals, Vol. 3, edited by R. K. Willardson and A.C. Beer, p. 17, Academic (1967).
W. G. Spitzer, Festkorperprobleme XI, 1 (1971).
S. S. Mitra, Advances in Physics, 20 359 (1971).
E. D. Palik and J. K. Furdyna, Repts. Prog. Phys. 33, 1193 (1970).
E. Burstein, G. Picus, B. W. Henvis and R. F. Wallis, J. Phys. Chem. Solids 1, 65 (1956): G. Picus, E. Burstein and B. W. Henvis 1, 75 (1956).
M. S. Skolnick, A. C. Carter, Y. Couder and R. A. Stradling, J. Opt. Soc. Am. 67. 947 (1977).
J. F. Black, E. Lanning, and S. Perkowitz, Infrared Phys. 10, 125 (1970).
S. Perkowitz and J. Breecher, Infrared Phys. 13 321 (1971).
M. Cardona, in Solid State Physics, Suppl. II, Modulation Spectroscopy, Academic (1969).
J. R. Dixon, in Optical Properties of Solids, edited by S. Nudelman and S. S. Mitra, p. 61, Plenum (1969).
R. T. Holm, J. W. Gibson, and E. D. Palik, J. Appl. Phys. 48, 212 (1977).
S. Perkowitz, Phys. Rev. B12, 3210 (1975).
C. E. Jones and A. R. Hilton, J. Electrochem. Soc. 112, 908 (1965).
A. Klotinsh, V. Petrov, and I. Feltinsk, Latv. PSR Zinot. Akad. Vestis, Fiz. Tek. Zinat. Ser. (USSR) No. 3, 40 (1974).
R. T. Holm and E. D. Palik, J. Vac. Sci. Technol. 13, 889 (1976).
K. Murase, S. Katsyama, Y. Ando and H. Kawamura, Phys. Rev. Lett. 33, 1481 (1974).
R. Tsu, H. Kawamura and L. Esaki, Solid State Comm. 15, 321 (1974).
R. A. Smith, Semiconductors, Cambridge University Press, (1959).
B. Donovan and N. H. March, Proc. Phys. Soc. 76, 528 (1956).
E. Gerlach and P. Grosse, Festkorperproblem XVII, 157 (1977).
E. Haga and H. Kimura, J. Phys. Soc. J.pan, 18, 777 (1963); 19, 471, 658, 1596 (1964).
B. Jensen, Ann. Phys. 80, 284 (1973); 95, 229 (1975); Phys. Stat. Sol. (b) 86 291 (1978).
R. M. Culpepper and J. R. Dixon, J. Opt. Soc. Am. 58, 96 (1968).
S. Perkowitz, J. Phys. Chem. Solids, 32 2267 (1971).
H. Sobotta, Phys. Lett. 32A 4 (1970).
R. N. Zitter and K. As’Saadi, J. Phys. Chem. Solids 35, 1593 (1974).
W. G. Spitzer and J. W. Whelan, Phys. Rev. 114, 59; (1959).
M. G. Mil’vidskii, F. B. Osvenskii, E. P. Rashevskaya and T. G. Yogova, Fiz. Tverd, Tela 7, 3448 (1965); (Soy. Phys. - Solid State 7, 2784 (1966).
V. Vakulenko and M. P. Lisitsa, Fiz. Tverd, Tela 9, 979 (1967); (Soy. Phys. - Solid State 9, 769 (1967).
E. P. Rashevskaya and V. I. Fistul’, Fiz. Tverd. Tela 9, 3618 (1967); (Sov. Phys.-Solid State 9, 2847 (1968).
D. F. Edwards and R. D. Maker, J. Appl. Phys. 33, 2466 (1962).
D. L. Spears and A. J. Strauss, Solid State Research Report, Lincoln Laboratory, MIT ( 1974: 3 )
B. Sherman and J. F. Black, Appl. Opt. 9, 802 (1970).
E. D. Jungbluth and J. F. Black, Solid State Comm. 13, 1099 (1973)
R. C. Newman, F. Thompson, M. Hyliands and R. F. Peart, Solid State Comm. 10, 505 (1972).
F. Thompson and R. C. Newman, J. Phys. C: Solid State Phys. 5, 1999 (1972).
S. R. Morrison, R. C. Newman and F. Thompson, J. Phys. C; Solid State Phys. 7, 633 (1974).
K. Laithwaite, R. C. Newmann, J. F. Angress and G. A. Gledhill, in Gallium Aresnide and Related Compounds (Edinburgh) 1976, edited by C. Hilsom, Conference Series No. 33a ( The Institute of Physics, Bristol 1977 ), p. 133.
M. M. Kreitman, K. K. Bajaj and C. W. Litton, Bull. Am. Phys. Soc. 23, 225 (1978).
B. D. McCombe, Characterization of III-V Materials, NRL Memorandum Report 3701 (Feb. 1978).
G. E. Stillman, C. M. Wolfe and D. M. Korn, Proc. 13th Conf. Phys. Semicond., Rome ( Tipografia, Rome, 1976 ), p. 623.
R. A. Cooke, R. A. Hoult, R. F. Kirkman and R. A. Stradling, J. Phys. D: Appl Phys. 11, 945 (1978).
J. H. M. Stoelinga, D. M. Larsen, W. Walukiewicz and R. L. Aggarwal, J. Phys. Chem. Solids (in press).
R. A. Stradling, L. Eaves, R. A. Hoult, N. Miura, P. E. Simmonds and C. C. Bradley, in Gallium Arsenide and Related Compounds, Conference Series No. 17, ( The Institute of Physics, London, 1973 ).
E. D. Palik, R. T. Holm and J. W. Gibson, Thin Solid Films 47, 167 (1977).
B. Molnar and T. A. Kennedy, J. Electrochem. Soc., (in press).
J.K. Furdyna, private communcation.
R. Kaplan and R. J. Wagner, J. Vac. Sci. Technol. 13, 899 (1976).
J. Botineau, F. Gires and C. Vanneste, C. R. Acad. Sc. Paris 278B, 171 (1974).
A. Azema, J. Botineau, F. Gires, A. Saissy and C. Vanneste, Appl. Phys. 9, 47 (1976).
R. T. Holm and J. A. Calviello, J. Appl. Phys. (in press).
V. L. Ginzburg, Propagation of Electromagnetic Waves, Gordon and Breach (1960).
C. D. Taylor and C. W. Harrison, J. Appl. Phys. 42, 2676 (1971).
F. Flores, F. Garcia-Moliner and G. Navascues, Surf. Sci. 24, 61 (1971).
G. Navascues and F. Flores, Solid State Comm. 9, 1267 (1971).
N. S. Kochneva and V. M. Kochetkov, Fiz. Tekh. Poluprovodn. 9, 1821 (1975).
W. E. TEnnant and J. A. Cape, Appl. Phys. Letters 26, 694 (1975).
P. M. Amirtharaj, B. J. Bean and S. Perkowitz, J. Opt. Soc. Am. 67, 939 (1977).
G. Horowitz, Phys. Stat. Sol. 39, 533 (1977).
G. K. Hubler and P. R. Malmberg, private communication.
V. M. Gusev, L. N. Strel’tsov and I. B. Khaibullin, Fiz. Tekh. Poluprovodn. 5, 832 (1971); Sov. Phys - Semicond. 5, 737 (1971).
W. G. Spitzer, C. N. Waddell, G. H. Narayanan, J. E. Fredrickson and S. Prussin, Appl. Phys. Lett. 30, 623 (1977).
G. K. Hubler, C. N. Waddell, W. G. Spitzer, R. G. Wilson, S. Prussin and J. E. Fredrickson, (private communication).
A. H. Kachare, W. G. Spitzer, F. K. Euler and A.Kahan, J. Appl. Phys. 45, 2938 (1974).
A. H. Kachare, W. G. Spitzer, J. E. Fredrickson and F. K. Euler, J. Appl. Phys. 47, 5374 (1976).
R. T. Holm, J. W. Gibson and E. D. Palik, Bull. Am. Phys. Soc. 20, 811 (1975).
B. Molnar, Report of NRL Progress, March 1975, p. 21.
D. E. Aspnes, in Optical Properties of Solids: New Developments, edited by B. 0. Seraphin, North Holland (1976) p. 799.
W. A. Pliskin, in Physical Measurement and Analysis of Thin Films, edited by E. M. Must and W. G. Guldner, p. 1, Plenum (1969).
D. E. Aspnes, B. Schwartz, A. A. Stdna, L. Derick and L. A. Koszi, J. Appl. Phys. 48 3510 (1977).
M. E. Pedinoff, M. Braunstein, and 0. M. Stafsudd, Appl. Opt. 16, 2849 (1977).
H. R. Philipp, J. Appl. Phys. 43, 2835 (1972).
B. C. Dobbs, W. J. Anderson and Y. S. Park, J. Appl. Phys. 48, 5052 (1977).
J. Fahrenfort, Spectrochem. Acta. 17, 698 (1961).
J. Fahrenfort andW. M. Visser, Spectrochm. Acta 18, 1103 (1962); 21, 1433 (1965).
N. J. Harrick Internal Reflection Spectroscopy, Wiley (1967).
D. C. Gupta, Solid State Electr. 13, 543 (1970).
W. G. Spitzer and H. Y. Fan, Phys Rev. 106, 882 (1957).
G. T. Ayoub and N. M. Bashara, J. Opt. Soc. Am. 67, 1430 (1977). Abstract.
D. E. Sawyer and D. W. Berning, NBS Special Publication 400–24 (Feb. 1977).
D.E. Sawyer, D. W. Berning and D. C. Lewis, Solid State Technol. Vol. 20, No. 6, p. 37 (1977).
D. W. Sawyer and D. W. Berning, Proc. IEEE 64 1634 (1976).
H. F. Matare, Solid State Technology, p. 56 (Sept. 1977).
D.L. Lile and N. M. Davis, in Proceedings of the Society of Photo-Optical Instrumentation Engineers, Vol. 62, Modern Utilization of Infrared Technology, p. 117 (1975).
J. W. Philbrick and T. H. Di Stefano, in Proceedings of the 13th Annual Reliability Physics Conference, Las Vegas 1975,p.159; T. H. DiStefano, NBS Special Publication 400–23, p. 197 (March 1976).
R. F. Greene, J. N. Zemel, A. D’Amico and N. Ginsburg, (private communication).
D. Peterman and W. Workman, Microelectronics and Reliability 6, 307 (1967).
S. V. Bearse, Microwaves, Jan. 1976, P. 14.
H. Kaplan, in Proceedings of the Society of Photo-Optical Instrumentation Engineers, Vol. 62, Modern Utilization of Infrared Technology, p. 238 (1975).
E. E. Anderson and P. S. Castro, in Proceedings of the Society of Photo-Optical Instrumentation Engineers, Vol 62, Modern Utilization of Infrared Technology, p. 231 (1975).
A. Marek, A. A. Jaecklin and J. Cornu, IEEE Transactions on Electron Devices ED-21, 54 (1974).
M. Balkanski, K. P. Jain, R. Beserman and M. Jouanne, Phys. Rev. B12, 4328 (1975).
R. Beserman and T. Bernstein, J. Appl. Phys. 48 1548 (1977).
J. Kotthaus, in Second International Conference of “Electronic Properties of Two-Dimensional Systems”, Berchtesgaden, (1977); Surface Sci. (in press).
D. C. Tsui, S. J. Allen, R. A. Logan, A. Kangar and S. N. Coppersmith, in Second International Conference of “Electronic Properties of Two-Dimensional Systems”, Berchtesgaden, (1977); Surf. Sci. (in press).
P. Kneschaurek, in Second International Conference of “Electronic Properties of Two-Dimensional Systems”, Berchtesgaden, (1977); Surf. Sci. (in press).
C. C. Hu, J. Pearse, K. M. Cham and R. G. Wheeler, in Second International Conference of “Electronic Properties of Two-Dimensional Systems”, Bechtesgaden, (1977); Surf. Sci. (in press).
E. Gornik and D. C. Tsui, in Second International Conference of “Electronic Properties of Two-Dimensional Systems”, Berchtesgaden, (1977); Surf. Sci. (in press).
J. S. Blakemore, Semiconductor Statistics, p. 75, Pergamon (1962).
R. F. Leheny and J. Shah, Solid State Electr. 21, 167 (1978).
J. O. Dimmock, in Semiconductors and Semimetals, Vol. 3, edited by R. K. Willardson and A. C. Beer, p. 290, Academic (1967).
W. F. Hall, W. E. Tennant, J. A. Cape and J. S. Harris, J. Vac. Sci. Technol. 13, 914 (1976).
J. P. van der Ziel andA. C. Cossard, J. Appl. Phys. 48, 3018 (1977).
B. 0. Seraphin, in Semiconductors and Semimetals, edited by R. K. Willardson and A. C. Beer, Vol. 9, p. 1, Academic (1972).
P. E. Vanier, F. H. Pollak and P. M. Raccah, Appl. Opt. 16. 2858 (1977).
N. Bottka and M. Hills, Bull. Am. Phys. Soc. 23, 291 (1978).
D. J. Ashen, P. J. Dean, D. T. J. Hurle, J. B. Mullin and A. M. White, J. Phys. Chem. Solids 36, 1041 (1975).
P. W. Yu and Y. S. Park, J. Appl. Phys. 48, 2434 (1977).
P. W. Yu, J. Appl. Phys. 48, 5043 (1977)
S. G. Bishop, J. Comas, S Sundaram and B. D. McCombe, Appl. Phys. Lett. 31, 845 (1977).
S. B. Nam, D. W. Langer, D. L. Kingston and M. J. Luciano, Appl. Phys. Lett. 31, 652 (1977).
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Palik, E.D., Holm, R.T. (1979). Optical Characterization of Semiconductors. In: Zemel, J.N. (eds) Nondestructive Evaluation of Semiconductor Materials and Devices. NATO Advanced Study Institutes Series, vol 46. Springer, Boston, MA. https://doi.org/10.1007/978-1-4757-1352-7_7
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