Backscattering Spectrometry and Related Analytical Techniques

Abstract

Analytical techniques based on the interaction of collimated beams with solids can be classified by the nature of the incident beam and of the detected radiation. Many possibilities can be conceived, particularly in the realm of particles. For the analysis of solids in particular, three types of radiations have gained notable significance: electromagnetic radiation, electrons, and light ions (mainly hydrogen and helium). Table 1 shows the nine distinct types of analytical techniques which one can devise with these three types of radiations. The table lists in the appropriate combination the names or acronyms of those analytical techniques which presently exist and are used routinely or on a research basis in the solution of problems in solid-state physics. It is apparent from the table that the frame of techniques based on electromagnetic and electron radiation, or cross-combinations of the two, are most common. Some of those methods (SEM, photoemission spectroscopy) are the subject of topical sessions in this Institute (see Chapters 8 and 11).