Content Mapping Techniques for Qualitative and Semiquantitative Analysis with the Electron Microbeam Probe

  • James S. Solomon
  • W. L. Baun
Part of the Developments in Applied Spectroscopy book series (DAIS, volume 9)


Content mapping of small surface areas with the electron microbeam probe can be used to quickly obtain very effectively both qualitative and quantitative information. An automatic content mapping device is available with the Hitachi Perkin-Elmer XMA-S Electron Probe Microanalyzer that can cover an area up to 50 microns by 50 microns. Compared with the conventional x-ray image, advantages of content mapping includes enhancement of the contrast of the element density distribution for specimens having an enriched element density with slight variation and for specimens under high magnification with poor contrast. The content mapping device is described and examples of content maps of various alloy composition and concentrations are shown.


Backscatter Electron Image Pulse Height Analyzer Content Mapping Gray Scale Range Aluminum Rich Phase 
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  1. T. Toraura, H. Okano, K. Hara and T. Watanabe, Advan. X-Ray Anal., 11, p. 316, (1967).Google Scholar

Copyright information

© Chicago Section of the Society for Applied Spectroscopy 1971

Authors and Affiliations

  • James S. Solomon
    • 1
  • W. L. Baun
    • 2
  1. 1.University of Dayton Research InstituteDaytonUSA
  2. 2.Air Force Materials Laboratory (MAYA)Wright-Patterson AFBUSA

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