Abstract
An ion-bombardment mass spectrometer has been applied to the investigation of thin layers and bulk materials. The specimen is mounted in the ion source of the mass spectrometer and bombarded continuously with argon ions of 11 keV energy. Only those particles leaving the surface directly as ions are extracted from the ion source, and are separated according to their m/e ratio. The influence of oxidation on the ion yield has been studied. A method has been derived for indicating metal oxides present in concentrations decreasing as a function of depth. With this method the diffusion profile of indium diffused into a germanium matrix was found to be in good agreement with the theoretical diffusion profile, thus proving the proportionality between ion current and concentration, both as a function of concentration and depth. The coefficient of diffusion of indium in germanium determined from our measurements is in good agreement with the values found by others using methods different from ours.
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References
R. E. Honig, Advances in Mass Spectrometry, Elliot, R. M. ed.. Vol. 2 Pergamon Press, London (1963), p. 25.
H. E. Beske, Z Naturforsch.19a, 1627 (1964).
A. Benninghoven and F. Kirchner, Z. Naturforsch. 18a, 1008 (1963).
H. J. Liebl and R. F. K. Herzog, J. Appl Phys. 34, 2893 (1963).
H. W. Werner, Philips Tech. Rev. 27, 344, (1966).
Ya. M. Fogel,Soviet Phys.-Uspekhi 10(1), 17 (1967).
H. W. Werner and H. A. M. de Grefte,Vakuum-Tech. 17, 37 (1967).
H. W. Wemer and H. A. M. de Grefte,1965 Transactions of the Third International Vacuumcongress, Stuttgart, Germany, H. Adam, ed., Vol. 2, Part II, Pergamon Press, New York (1965), p. 493.
S. Datz and C. Snoek, Phys. Rev. 134A, 347 (1964).
A. Benninghoven,Ann Physik 15, 113 (1965).
C. Snoek, W. F. v. d. Weg, R. Geballe, and P. K. Rol, 7th Intern. Conference on Phenomena in Ionized Gases, B. Perovic, ed., Gradevinska Knijiga, Beograd, 1966.
P. Joyes and R. Castaing, Compt. Rend. 263, 384 (1966).
W. F. V. d. Weg and P. K. Rol, Nucl. Instr. Methods, 38, 274 (1966).
A. Benninghoven, Zum Mechanismus der lonenbildung und lonenemission bei der Fest- körperstäubung, Z. Physik, 220, 159–180 (1969).
P K. Rol ,D. Onderdelinden, and J. Kistemaker, Some Physical Aspects of Sputtering, 1965 Transactions of the Third Intern. Vacuum Congress, Stuttgart, Germany, Vol. 1.
W. F. v. d. Weg NucI. Instr. Methods 38, 274 (1966)
H. E. Beske, Untersuchung des lonenbeschusses fester Targets zur Verwendung als lonenquellen in der analytischen Massenspektroskopie, Paper given at the Spring meeting, Deutsche Physikalische Gesellschaft, Freudenstadt, Germany, 1966, to be published.
J. Schelten, Positive Sekundarionenausbeute, gemessen an Standards, Paper given at the Spring meeting, Deutsche Physikalische Gesellschaft, Freudenstadt, Germany, 1967, to be pubhshed.
G. Slodzian and J. Hennequin, Compt. Rend, 263, 1246 (1966).
A. Benninghoven, Z. Naturforsch, 22a, 841 (1967).
W. Bösenberg, Z. Naturforsch. 10a, 285 (1955).
W. C. Dunlap, Rev. 94, 1531 (1954)
H. Liebl, J. Appl. Phys. 38, 5277 (1967).
R. Castaing and G. Slodzian,Compt. Rend, 1962, 1873.
J. Bailleul-Langlais, Thesis presented to the Faculty of Science, University of Paris, March 1968
R. Castaing, Optique des Rayons X et Microanalyse, IVe Congrès international sur l’optique des Rayons X et la microanalyse, Orsay, Sept. 1965, Hermann, Paris (1966), p. 48.
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© 1969 Chicago Section of the society for Applied Spectroscopy
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Werner, H.W. (1969). Investigation of Solids by Means of an Ion-Bombardment Mass Spectrometer. In: Grove, E.L., Perkins, A.J. (eds) Developments in Applied Spectroscopy. Developments in Applied Spectroscopy, vol 7a. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-8700-8_17
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DOI: https://doi.org/10.1007/978-1-4684-8700-8_17
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