Abstract
Ultrapure water is an essential chemical and material for the production of semiconductor devices. Impurities in the process water such as bacteria, organics, ionic contaminations and particles are a potential cause of reduced device yield and reliability failures.
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© 1988 Plenum Press, New York
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Krapf, E., Preisser, R. (1988). High Purity Water for Semiconductor Manufacturing. In: Process Technologies for Water Treatment. Earlier Brown Boveri Symposia. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-8556-1_17
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DOI: https://doi.org/10.1007/978-1-4684-8556-1_17
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4684-8558-5
Online ISBN: 978-1-4684-8556-1
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