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Structure of Ceramic Surfaces Modified by Ion Beam Techniques

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Emergent Process Methods for High-Technology Ceramics

Part of the book series: Materials Science Research ((MSR,volume 17))

Abstract

Modification of the near-surface region of materials by use of energetic ion beams has been investigated extensively in recent years. The nature of the process allows one to introduce any element into the near-surface region of solids in a controlled and reproducible manner that is independent of most equilibrium constraints. Since the process is nonequilibrium in nature, compositions and structures unattainable by conventional methods may be produced.

Research Sponsored by the Division of Materials Sciences, U.S. Department of Energy, under contract W-7405-eng-26 with the Union Carbide Corporation.

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References

  1. G. W. Arnold, G. B. Krefft, and C. B. Norris, Appi. Phys. Lett., 25, 540–42 (1974).

    Article  CAS  Google Scholar 

  2. B. D. Evans, H. D. Hendricks, F. D. Bazzarre, and J. M. Bunch, pp. 265–74 in Ion Implantation in Semiconductors-1976, edited by F. C. Chernow, J. A. Borders, and D. K. Brice, Plenum Press, NY, 1976.

    Google Scholar 

  3. T. F. Leura, J. A. Borders, and G. W. Arnold, Ibid., pp. 285–94.

    Google Scholar 

  4. H. M. Naguib, J. F. Singleton, W. A. Grant, and G. Carter, J. Mater. Sci., 8, 1633–40 (1973).

    Article  CAS  Google Scholar 

  5. A. V. Drigo, S. Lo Russo, P. Mazzoldi, P. D. Goude, and N. E. W. Hartley, Radiat. Eff., 33, 161–71 (1977).

    Article  CAS  Google Scholar 

  6. A. Camera, A. Drigo, and P. Mazzoldi, Radiat. Eff., 49, 29–32 (1980).

    Article  Google Scholar 

  7. A. Camera, G. Della Mea, A. V. Drigo, S. Lo Russo, P. Mazzoldi, and N. E. W. Hartley, Radiat. Eff., 35, 201–8 (1978).

    Article  Google Scholar 

  8. A. Turos, H. Matzke, and P. Rabette, Phys. Stat. Sol. (a), 64, 565–75 (1981.

    Article  CAS  Google Scholar 

  9. G. B. Krefft, W. Beezhold, and E. P. EerNisse, IEEE Trans. Nucl. Sci., NS-22, 2247–49 (1975).

    Article  Google Scholar 

  10. G. Krefft and E. EerNisse, J. Appl. Phys., 49, 2725–30 (1978).

    Article  CAS  Google Scholar 

  11. H. M. Naguib and R. Kelly, Radiat Eff., 25, 1–12 (1975).

    Article  CAS  Google Scholar 

  12. C. Jech and R. Kelly, J. Phys. Chem. Sol., 30, 465–74 (1969); 31, 41–48 (1970).

    Article  CAS  Google Scholar 

  13. H. Matzke and J. L. Whitton, Canad. J. Phys., 44, 995–1010 (1966).

    Article  CAS  Google Scholar 

  14. M. D. Rechtin, Radiat. Eff., 42, 129–44 (1979).

    Article  CAS  Google Scholar 

  15. O. J. Marsh and H. L. Dunlap, pp. 285–95 in Ion Implantation, edited by F. Eisen and L. T. Chadderton, Gordon and Breach, NY, 1970.

    Google Scholar 

  16. R. Hart, H. Dunlap, and O. Marsh, Radiat. Eff., 9 261–66 (1971).

    Article  CAS  Google Scholar 

  17. O. J. Marsh, pp. 471–85 in Silicon Carbide-1973, edited by R. C. Marshall, J. W. Faust, Jr., and C. E. Ryan, University of South Carolina Press, 1973.

    Google Scholar 

  18. A. B. Campbell, J. B. Mitchell, J. Shewchun, D. Thompson, and J. A. Davies, Ibid., pp. 486–92.

    Google Scholar 

  19. W. J. Choyke, L. Patrick, and P. J. Dean, Phys. Rev. B, 10, 2554–65 (1974).

    Article  Google Scholar 

  20. A. B. Campbell, J. Shewchun, D. A. Thompson, J. A. Davies, and J. B. Mitchell, pp. 291–98 in Ion Implantation in Semiconductors, edited by S. Namba, Plenum Press, NY, 1975.

    Book  Google Scholar 

  21. D. A. Thompson, M. C. Chan, and A. B. Campbell, Canad. J. Phys., 54, 626–32 (1976).

    Article  CAS  Google Scholar 

  22. R. B. Wright, R. Varma, and D. M. Gruen, J. Nucl. Mater., 63., 415–21 (1976).

    Article  CAS  Google Scholar 

  23. R. B. Wright and D. M. Gruen, Radiat. Eff., 33, 133–40 (1977).

    Article  CAS  Google Scholar 

  24. V. V. Makarov, T. Tuomi, and K. Naukkarinen, Appl. Phys. Lett., 35, 922–24 (1979).

    Article  CAS  Google Scholar 

  25. K. Padmanabhan and G. Sorensen, Thin Solid Films, 18, 13–19 (1981).

    Article  Google Scholar 

  26. C. J. McHargue, H. Naramoto, B. R. Appleton, C. W. White, and J. M. Williams, pp. 147–53 in Metastable Materials by Ion Implantation, S. T. Picraux and W. J. Choyke, North Holland, NY, 1982.

    Google Scholar 

  27. C. J. McHargue and J. M. Williams, Ibid., pp. 303–9.

    Google Scholar 

  28. H. Naramoto, C. W. White, J. M. Williams, C. J. McHargue, O. W. Holland, M. M. Abraham, and B. R. Appleton, submitted to J. Appl. Phys.

    Google Scholar 

  29. D. S. Philips, A. H. Heuer, and T. E. Mitchell, Phil. Mag. A, 42, 385–432 (1980).

    Article  Google Scholar 

  30. J. M. Williams, C. J. McHargue, and B. R. Appleton, in Proceedings of Ion Beam Modification of Materials-1982, to be published in J. Nuc. Instr. Meth.

    Google Scholar 

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Author information

Authors and Affiliations

  1. Oak Ridge National Laboratory, 37830, Oak Ridge, Tennessee, USA

    C. J. McHargue, H. Naramoto, C. W. White, J. M. Williams, B. R. Appleton, P. S. Sklad & P. Angelini

  2. Physics Division, JAERI, Tokai-mura, Japan

    H. Naramoto

Authors
  1. C. J. McHargue
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  2. H. Naramoto
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  3. C. W. White
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  4. J. M. Williams
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  5. B. R. Appleton
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  6. P. S. Sklad
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  7. P. Angelini
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Editor information

Editors and Affiliations

  1. School of Engineering, North Carolina State University, Raleigh, North Carolina, USA

    Robert F. Davis , Hayne Palmour III  & Richard L. Porter ,  & 

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© 1984 Plenum Press, New York

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McHargue, C.J. et al. (1984). Structure of Ceramic Surfaces Modified by Ion Beam Techniques. In: Davis, R.F., Palmour, H., Porter, R.L. (eds) Emergent Process Methods for High-Technology Ceramics. Materials Science Research, vol 17. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-8205-8_37

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  • DOI: https://doi.org/10.1007/978-1-4684-8205-8_37

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4684-8207-2

  • Online ISBN: 978-1-4684-8205-8

  • eBook Packages: Springer Book Archive

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