Abstract
Laser induced gas phase reactions have been used to produce highly controlled powder and thin film reaction products. Powders of Si, Si3N4 and SiC exhibit presumed ideal characteristics for consolidation into dense ceramic parts. Individual powder characteristics can be manipulated with this process while being highly efficient in terms of materials utilization and energy consumption. The CVD process permits physical, electronic and crystallographic properties to be controlled. Resulting amorphous Si films exhibit superior properties.
This is a preview of subscription content, log in via an institution to check access.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
J. S. Haggerty, “Sinterable Powders from Laser Driven Reactions,” Energy Laboratory Report MIT-EL 82–002, Massachusett Institute of Technology, Cambridge, MA, 1981.
T. R. Gattuso, M. Meunier, and J. S. Haggerty, “Laser Induced Deposition of Thin Films,” Energy Laboratory Report MIT-EL 82–002, May 1982.
W. R. Cannon, S. C. Danforth, J. H. Flint, J. S. Haggerty, and R. A. Marra, J. Am. Ceram. Soc., 65, 7, 324–30 (1982).
W. R. Cannon, S. C. Danforth, J. S. Haggerty, and R. A. Marra, J. Am. Ceram. Soc., 65, 7, 330–35 (1982).
R. A. Marra and J. S. Haggerty, Ceram. Eng. and Sci. Proc., 3, 1–2, 3–19 (1982).
J. H. Flint, (M.S. Thesis), M.I.T., February 1982.
A. D’Alessio, A. Dilorenzo, A. F. Sarofim, F. Beretta, S. Masi, and C. Venitozzi, p. 1427 in Fifteenth Symposium (International) on Combustion, The Combustion Institute, Pittsburg, PA, 1975.
R. A. Marra, (Ph.D. Thesis), M.I.T., February 1983.
Y. Suyama, R. A. Marra, J. S. Haggerty, and H. K. Bowen, submitted for publication to the J. Am. Ceram. Soc., October (1982).
T. R. Gattuso, M. Meunier, D. Adler, and J. S. Haggerty, Proceedings of the Symposium on Laser Diagnostics and Photochemical Processing for Semiconductor Devices, Materials Research Society, November 3–4, 1982, Boston, MA.
C. P. Christensen and K. M. Lakin, Appi. Phys. Lett., 32, 254–55 (1978).
V. Baranauskas, C. I. Z. Mammana, R. E. Klinger, and J. E. Greene, Appi. Phys. Lett., 36, 930–32 (1980).
S. D. Allen, J. Appi. Phys., 52, 6501–05 (1981).
R. Bilenchi and M. Musei, Electrochemical Soc., 275–83 (1981).
P. K. Boyer, G. A. Roche, W. H. Ritchie, and G. J. Collins, Appl. Phys. Lett., 40, 716–19 (1982).
T. F. Deutsch, D. J. Ehrlich, and R. M. Osgood, Jr., Appi. Phys. Lett., 35, 175–77 (1979).
J. W. C. Johns and W. A. Kreiner, J. Mol. Spec., 60, 400–11 (1976).
A. C. G. Mitchell and M. W. Zemansky, Resonance Radiation and Excited Atoms, Cambridge University Press, Cambridge, 1961.
H. Okabe, Photochemistry of Small Molecules, Wiley, NY, 1978.
J. Bloem and L. J. Giling, Current Topics in Materials Science, edited by E. Kaldis, 147–342 (1978).
B. A. Scott, R. M. Plecenik, and E. E. Simonyi, Appi. Phys. Lett., 39, 73–75 (1981).
T. F. Deutsch, J. Chem. Phys., 70, 1187–92 (1979).
H. Hirose, J. de Physique, C4, 705–14 (1981).
S. Hasegawa et al., Phil. Mag. B, 43, 149–56 (1981).
H. Fritzche, Sol. En. Mat., 5, 229–316 (1981).
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1984 Plenum Press, New York
About this chapter
Cite this chapter
Haggerty, J.S. (1984). Synthesis of Powders and Thin Films by Laser Induced Gas Phase Reactions. In: Davis, R.F., Palmour, H., Porter, R.L. (eds) Emergent Process Methods for High-Technology Ceramics. Materials Science Research, vol 17. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-8205-8_10
Download citation
DOI: https://doi.org/10.1007/978-1-4684-8205-8_10
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4684-8207-2
Online ISBN: 978-1-4684-8205-8
eBook Packages: Springer Book Archive