Abstract
The air in the clean rooms used to manufacture microchips must be 1,000 times cleaner than that in a hospital operating room to avoid the danger of contaminant damage to chips. A typical clean room is shown in Figure 1.
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© 1989 Springer Science+Business Media New York
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Miller, R.K. (1989). Clean Room Robotics. In: Industrial Robot Handbook. VNR Competitive Manufacturing Series. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-6608-9_32
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DOI: https://doi.org/10.1007/978-1-4684-6608-9_32
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4684-6610-2
Online ISBN: 978-1-4684-6608-9
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