Liquid Cleaning Methods

Abstract

Clean liquids are required in all cleanroom operations, whether the clean liquids are the product or are used in the fabrication of other cleanroom products. Processing and final cleaning of liquids to be used for semiconductor devices is frequently carried out in cleanrooms to provide clean process material for a later operation. Many pharmaceutical products are liquids used for injection or ingestion. Plastic films to be used for photography or for packaging elements are polymerized from organic liquids, which must be free of contaminating particles. These and other similar products must be free of both dissolved and suspended contaminants. Very clean reagent-grade water is required for container cleaning before products are placed in the containers. In the semiconductor industry, many manufacturing processes result in deposition of contaminants that must be removed from components by flushing with clean liquids. In addition, semiconductor manufacturing often requires the use of process chemicals that may be received with a high contamination level. Most aerospace device surfaces must be cleaned before use. This requirement applies both to operating devices and especially to the interior of fuel and oxidizer storage and flow systems. Liquids of all types are used in these areas. They may be inorganic or organic, with high or low vapor pressures, inert or reactive, and single component or mixtures.