Abstract
In the last chapter, the areas where contaminants are generated were discussed. Knowing the location of contaminant generation is helpful in controlling that contamination, but understanding the mechanisms is equally important in that control process. Process materials, tools, equipment, and personnel control of operations are necessary in any production operation. Many of the contaminant sources cannot be avoided, but some control and remedial activities are possible and should be used. Knowing the contamination-generation processes and the mechanisms involved may aid in providing information to minimize the type, rate, and time of contaminant emission from specific sources. Understanding the contaminant-generation mechanisms can also help to show the nature of the specific contaminant material that is produced by a particular source. In this way, knowledge is available that may allow advantageous modification of a process or component to reduce contamination-generation rates.
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References
Borden, P., 1990. Monitoring Particles in Production Vacuum Process Equipment: The Nature of Particle Generation. Microcontamination 8( 1 ):21–26.
Liu, B. Y. H., et al., 1985. Characterization of Electronic Ionizers for Clean Rooms. Proceedings of the 31st Institute of Environmental Sciences Annual Technical Meeting, May 1985, Las Vegas.
Prater, W., et al., 1989. Preventing Contamination in Magnetic Disk Drives Through the Use of Wear Resistant Coatings. Microcontamination 7(4):31–39.
Sebald, T., Stiehl, H., & Sigusch, R., 1986. How to Avoid Particle Generation from Needle Electrodes of Ionizer Systems for Clean Rooms. Proceedings of the Fine Particle Society Technical Meeting, July 1986. San Francisco.
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© 1992 Van Nostrand Reinhold
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Lieberman, A. (1992). Contaminant-Generation Mechanisms. In: Contamination Control and Cleanrooms. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-6512-9_6
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DOI: https://doi.org/10.1007/978-1-4684-6512-9_6
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4684-6514-3
Online ISBN: 978-1-4684-6512-9
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