Abstract
Gas filtration of air in the cleanroom is carried out with HEPA (high- efficiency particulate air) or ULPA (ultralow penetration air) filters for ambient pressure air cleaning or with high-efficiency cartridge filters for compressed gas cleaning. Filter testing is required for both types not only to verify the performance of the filter element or filter medium proper but also to ensure the integrity of the installed filter. The ambient air filters for the cleanroom are relatively fragile and require great care in handling to avoid damage to the filter medium and the resultant leaks. The cartridge filters are not so delicate but still require care in installation to ensure that seals and O-rings are correctly installed when the cartridge is changed.
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© 1992 Van Nostrand Reinhold
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Lieberman, A. (1992). Gas Filter Testing Methods. In: Contamination Control and Cleanrooms. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-6512-9_28
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DOI: https://doi.org/10.1007/978-1-4684-6512-9_28
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