Abstract
For most cleanroom airborne particle measurements, an optical single particle counter (OPC) is used. An OPC measures particle size in response to the amount of light level change caused by the presence of a particle as it passes through a sensing zone within the OPC. The light level change can be positive or negative, depending upon the nature of the OPC. Three types of measurements are made with OPCs. Particles suspended in gas or liquid or on surfaces are measured. Particles can be counted and sized in ambient air or in either compressed or low-pressure gases with these devices. Particles can be measured in a variety of liquids, including those that are extremely corrosive. Particles can also be measured on surfaces that are actual product surfaces or surrogates of the product or of the cleanroom environment. The last procedure is used to indicate deposition upon critical surfaces that cannot be removed from the product area for testing purposes.
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References
Aitken, J., 1888. On the Number of Dust Particles in the Atmosphere. Proceedings of the Royal Society, Edinburgh, p. 35.
Bartz, H., et al., 1985. Response Characteristics for Four Different Condensation Nucleus Counters to Particles in the 3-50 nm Diameter Range. Journal of Aerosol Science 16(5):443–456.
Borden, P., & Knodle, W., 1988. Monitoring Particles in Vacuum Equipment. Proceedings of the 9th International Committee of Contamination Control Societies Conference, pp. 204–207, September 26, 1988, Los Angeles.
Borden, P., et al., 1989. Real-Time Monitoring of Large Particle Fallout for Aerospace Applications. Proceedings of the 35th Institute of Environmental Science Annual Technical Meeting, pp. 394–396, April 1989, Anaheim, CA.
Bowling, R. A., Larrabee, G. B., & Fisher, W. G., 1989. Status and Needs of In-Situ Real-Time Process Particle Detection. Journal of Environmental Science 32(5):22–27.
Cooke, D. D., & Kerker, M., 1975. Response Calculations for Light Scattering Aerosol Particle Counters. Applied Optics 14(3):734–739.
Ensor, D. S., & Donovan, R. P., 1985. The Application of Condensation Nuclei Monitors to Clean Rooms. Journal of Environmental Science 28(2): 34–36.
Ensor, D. S.,et al., 1989. Measurement of Ultrafine Aerosol Particle Size Distributions at Low Concentrations by Parallel Arrays of a Diffusion Battery and a Condensation Nucleus Counter in Series. Journal of Aerosol Science 20(4): 471–475.
Fisher, M. A., et al., 1955. The Aerosoloscope: An Instrument for the Automatic Counting and Sizing of Aerosol Particles. Proceedings of the Third National Air Pollution Symposium, April 18–20, 1955, Pasadena, CA.
Hayakawa, I., et al., 1984. Image Processing on Remote Detected Particulates in Clean Room. Proceedings of the 30th Institute of Environmental Science Annual Technical Meeting, pp. 90–93, May 1984, Orlando, FL.
Hodkinson, J. R., & Greenfield, J. R., 1965. Response Calculations for Light Scattering Aerosol Counters. Applied Optics 4(1): 1463–1474.
Knollenberg, R. G., 1987. Sizing Particles at High Sensitivity in High Molecular Scattering Environments. Proceedings of the 34th Institute of Environmental Science Annual Technical Meeting, May 1987, King of Prussia, PA.
Lieberman, A., 1988. A New 0.05 μm, 0.1 CFM Optical Particle Counter. Proceedings of the 20th DOE/NRC Nuclear Air Cleaning Conference, August 1988, Boston.
Lieberman, A., & Stockham, J., 1961. Automatic Techniques of Airborne Particle Counting. Air Engineering 2(1):37–39.
Niida, T., et al., 1988. Counting Efficiency of Condensation Nuclei Counters in N2, Ar, CO2 and He. Journal of Aerosol Science 19(7): 1417–1420.
Sinclair, D., 1982. Particle Size Sensitivity of Condensation Nucleus Counters. Atmospheric Environment 16(5):955–958.
Stolzenburg, M. R., & McMurry, P. H., 1984. A Theoretical Model for an Ultrafine Aerosol Condensation Nucleus Counter. In Aerosols, ed. B. Y. H. Liu, et al., pp. 59–62. New York: Elsevier.
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© 1992 Van Nostrand Reinhold
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Lieberman, A. (1992). Optical Airborne Particle Counter Operation. In: Contamination Control and Cleanrooms. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-6512-9_23
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DOI: https://doi.org/10.1007/978-1-4684-6512-9_23
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