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Diamond and Diamond-like Films and Coatings pp 275–280Cite as

Preparation and Characterization of Doped a-C:H Films

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Part of the book series: NATO ASI Series ((NSSB,volume 266))

Abstract

Amorphous hydrogenated carbon films are known to be extremely hard, wear-resistant and chemically inert1. In general, they are electrically insulating. Meyerson and Smith2,3 and Jones and Stewart4 showed that a-C:H can be made conductive by addition of the “classical” doping agents, i.e. PH3, B2H6, and N2. It has been discussed4,5,6 whether the term “doping” can be used with this materials like with crystalline semiconductors.

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References

  1. C.P. Klages and R. Memming, “Microstructure and Physical Properties of Metal-containing Hydrogenated Carbon Films” in: “Amorphous Hydrogenated Carbon”, J.J. Pouch, S.A. Alterovitz, eds., TransTech Publications (1989)

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  3. B. Meyerson and F.W. Smith, “Thermopower of doped semiconducting hydrogenated amorphous carbon films”, Solid State Commun. 41: 23 (1982)

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  4. D.I. Jones and Stewart, “Properties of hydrogenated amorphous carbon films and the effects of doping”, Philos. Mag. B 46: 423 (1982)

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  8. N.F. Mott, “Conduction in glasses containing transition metal ions”, J. NonCryst. Sol. 1: 1 (1968)

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Author information

Authors and Affiliations

  1. Institut für Solarenergieforschung (ISFH), Sokelantstraße 5, D-3000, Hannover 1, Germany

    K. Rohwer, P. Hammer, A. Helmbold, D. Bahnemann & D. Meissner

  2. Battelle-Institut e.V., Am Römerhof 35, D-6000, Frankfurt am Main 90, Germany

    W. Hedderich, R. Hartmann & W. Ronge

Authors
  1. K. Rohwer
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  2. P. Hammer
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  3. A. Helmbold
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  4. D. Bahnemann
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  5. D. Meissner
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  6. W. Hedderich
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  7. R. Hartmann
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  8. W. Ronge
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Editor information

Editors and Affiliations

  1. Metals and Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, 37831-6093, Oak Ridge, Tennessee, USA

    Robert E. Clausing

  2. Metals and Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, 37831-6118, Oak Ridge, Tennessee, USA

    Linda L. Horton

  3. Department of Chemical Engineering, Case Western Reserve University, 44106, Cleveland, Ohio, USA

    John C. Angus

  4. Fraunhofer Institut für Angewandte Festkörperphysik, Tullastrasse 72, D-7800, Freiburg, Germany

    Peter Koidl

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© 1991 Plenum Press, New York

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Rohwer, K. et al. (1991). Preparation and Characterization of Doped a-C:H Films. In: Clausing, R.E., Horton, L.L., Angus, J.C., Koidl, P. (eds) Diamond and Diamond-like Films and Coatings. NATO ASI Series, vol 266. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-5967-8_14

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  • DOI: https://doi.org/10.1007/978-1-4684-5967-8_14

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4684-5969-2

  • Online ISBN: 978-1-4684-5967-8

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