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Computer Modeling of C:H Film Growth

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Diamond and Diamond-like Films and Coatings

Part of the book series: NATO ASI Series ((NSSB,volume 266))

Abstract

Hydrogenated amorphous carbon films1–5 exhibit specific properties which render them suitable for a wide field of applications, such as optical coatings, hard mechanical coatings, protective coatings, electrically insulating films, and low-Z inner wall coatings in fusion devices.6 For their production, a number of different processes are available. Glow-discharge plasmaenhanced chemical vapour deposition is most widely employed. However, such films result also from hydrocarbon ion deposition7,8 and hydrogen implantation into graphite.9

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Author information

Authors and Affiliations

  1. Max-Planck-Institut für Plasmaphysik, EURATOM-Association, D-8046, Garching, Fed. Rep. of Germany

    Wolfhard Möller

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  1. Wolfhard Möller
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Editors and Affiliations

  1. Metals and Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, 37831-6093, Oak Ridge, Tennessee, USA

    Robert E. Clausing

  2. Metals and Ceramics Division, Oak Ridge National Laboratory, P.O. Box 2008, 37831-6118, Oak Ridge, Tennessee, USA

    Linda L. Horton

  3. Department of Chemical Engineering, Case Western Reserve University, 44106, Cleveland, Ohio, USA

    John C. Angus

  4. Fraunhofer Institut für Angewandte Festkörperphysik, Tullastrasse 72, D-7800, Freiburg, Germany

    Peter Koidl

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© 1991 Plenum Press, New York

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Möller, W. (1991). Computer Modeling of C:H Film Growth. In: Clausing, R.E., Horton, L.L., Angus, J.C., Koidl, P. (eds) Diamond and Diamond-like Films and Coatings. NATO ASI Series, vol 266. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-5967-8_11

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  • DOI: https://doi.org/10.1007/978-1-4684-5967-8_11

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4684-5969-2

  • Online ISBN: 978-1-4684-5967-8

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