Abstract
Secondary ion mass spectrometry, SIMS, is the mass spectrometry of atomic or molecular particles which are emitted (a process known as sputtering) when a surface, usually a solid although it may be a liquid, is bombarded by energetic primary particles. The primary particles may be electrons, ions, neutrals or photons. The secondary ions which are detected may be emitted from the surface in the ionised state or they may be initially emitted as neutrals to be post-ionised before analysis.
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Reed, N.M., Vickerman, J.C. (1991). Secondary Ion Mass Spectrometry — Fundamentals and Application to Heterogeneous Catalysis. In: Brongersma, H.H., van Santen, R.A. (eds) Fundamental Aspects of Heterogeneous Catalysis Studied by Particle Beams. NATO ASI Series, vol 265. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-5964-7_27
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DOI: https://doi.org/10.1007/978-1-4684-5964-7_27
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