Abstract
Thin films were prepared by excimer laser ablation from Y-Ba-Cu-O and Tl-Ba-Ca-Cu-O targets. The films were prepared upon amorphous quartz and crystalline Si (111) substrates in partial pressures of oxygen. The substrate-film interaction, crystallization, composition, and microstructure of these films verst_s the deposition condition variables were studied including, substrate temperature, oxygen partial pressure, laser fluence and repetition rate. Additional deposition variables include the substrate/substrate holder and plasma generation loop DC and RE bias conditions and the target which can be DC biased. With the various biasing/plasma conditions we have studied to date, we have been unable to lower the substrate deposition temperature required for crystallization of Y-Ba-Cu-O films by more than 50 degrees C. Films of Y-Ba-Cu-O produced upon Si (111) are shown to be superconducting.
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References
D. Dijkkamp, T. Venkatessan, X. D. Wu, S. A. Shaheen, N. Jisrawi, Y. H. Min-Lee, W. L. McLean, and M. Croft, Appl. Phys. Lett. 51, 861 (1987).
X. D. Wu, A. Inam, T. Venkatessan, C. C. Chang, E. W. Chase, P. Barboux, J. M. Tarason, and B. Wilkins, Appl. Phys. Lett. 52, 754 (1988).
T. Venkatessan, X. D. Wu, A. loam, J. B. Wachtman, Appl. Phys. Lett. 52, 1193 (1988).
S. Watanachchi, H. S. Kwo, X. W. Wang, D. T. Shaw, Appl. Phys. Lett. 53, 234 (1988)
S. Witanachchi, H. S. Kwo, D. T. Shaw, submitted to Appl. Phys. Lett.
R. A. Neifeld, S. Gunapala, G. Liangf, S. A. Shaheen, M. Croft, J. Price, D. Simons, W. T. Hill, III, Appl. Phys. Lett. 53, 703 (1988)
R. Neifeld, et. al. in, “PROCESSING AND APPLICATIONS OF HIGH T, SUPERCONDUCTORS: STATUS AND PROSPECTS.” edited by W. Mayo ( TMS, Warrendale, PA, 1988 )
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© 1989 Plenum Press, New York
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Neifeld, R.A. et al. (1989). Preparation of High Temperature Superconductor Thin Films on Si Based Substrates by Excimer Laser Ablation, Film-Substrate Interactions, and Plasma Processing Effects on Crystallinity. In: McConnell, R.D., Wolf, S.A. (eds) Science and Technology of Thin Film Superconductors. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-5658-5_6
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DOI: https://doi.org/10.1007/978-1-4684-5658-5_6
Publisher Name: Springer, Boston, MA
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