Abstract
For the high TC system of TlBaCaCuO1, it is specially interesting to investigate the formation of films from sputtered BaCaCuO2. In such experiments, a Tl-free target of BaCaCuO is used for the film deposition and therefore the contamination problem of the vacuum system can be avoided. Using such rf sputtered BaCaCuO films, it is necessary to carry out oxidation and Ti diffusion to form the final compound. In this paper, some of the experimental results on the deposition of BaCaCuO thin films are first described. Variation of composition in the BaCaCuO films with the heat treatment is then presented.
This is a preview of subscription content, log in via an institution.
Buying options
Tax calculation will be finalised at checkout
Purchases are for personal use only
Learn about institutional subscriptionsPreview
Unable to display preview. Download preview PDF.
References
Z.Z. Sheng and A.M. Herman, Nature, 332, 138 (1988).
C.X. Qiu and I. Shih, Applied Physics Letters, 53, 1122 (1988).
M.W. Denhoff, P. Grant, C.X. Qiu, I. Shih, P.T. Robinson, I. Sproule and D. Mitchell, submitted to Applied Physics Letters.
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1989 Plenum Press, New York
About this chapter
Cite this chapter
Qiu, C.X., Shih, I., Moreau, C., Champagne, B., Dallaire, S. (1989). Deposition of TlBaCaCuO Thin Films. In: McConnell, R.D., Wolf, S.A. (eds) Science and Technology of Thin Film Superconductors. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-5658-5_32
Download citation
DOI: https://doi.org/10.1007/978-1-4684-5658-5_32
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4684-5660-8
Online ISBN: 978-1-4684-5658-5
eBook Packages: Springer Book Archive