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The Contribution of Atomic Steps to Reflection High Energy Electron Diffraction from Semiconductor Surfaces

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Reflection High-Energy Electron Diffraction and Reflection Electron Imaging of Surfaces

Part of the book series: NATO ASI Series ((NSSB,volume 188))

Abstract

Reflection high energy electron diffraction (RHEED) is a powerful tool for the study of surface processes. Because of the glancing geometry of RHEED, the high energy electrons only interact strongly with the first few layers of material. The glancing angle makes it exceedingly sensitive to surface morphology. However, the strong scattering of the electrons by the atomic potentials causes strong dynamical (multiple) scattering events to occur. This makes the diffracted intensities difficult to interpret.

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References

  1. P. K. Larsen, G. Meyer-Ehmsen, B. Bolger and A.-J. Hoeven, J. Vac.Sci. Technol., A5:611 (1987).

    ADS  Google Scholar 

  2. J. Zhang, J. H. Neave, P. J. Dobson and B. A. Joyce, Appl. Phys., A42:317 (1987).

    ADS  Google Scholar 

  3. P. R. Pukite, J. M. Van Hove and P. I. Cohen, J. Vac. Sci. Technol., B2:243 and Appl. Phys. Lett., 44:456 (1984).

    Google Scholar 

  4. J. H. Neave, B. A. Joyce, P. J. Dobson and N. Norton, Appl. Phys., A31:l (1983).

    Google Scholar 

  5. Y. Tanishiro, T. Takayanagi and K. Yagi, Ultramieroscopy, 11:95 (1983).

    Article  Google Scholar 

  6. G. Somorjai, “Chemistry in Two Dimensions: Surfaces”, Cornell University, Ithaca, NY (1981).

    Google Scholar 

  7. P. R. Pukite and P. I. Cohen, J. Cryst. Growth, 50:1739 (1987).

    Google Scholar 

  8. P. R. Pukite and P. I. Cohen, Appl. Phys. Lett., 81:214 (1987).

    Google Scholar 

  9. J. M. Van Hove, C. S. Lent, P. R. Pukite and P. I. Cohen, J. Vac.Sci. Technol., B1:741 (1983).

    Google Scholar 

  10. J. M. Cowley and H. Shuman, Surface Sci., 38:53 (1973).

    Article  ADS  Google Scholar 

  11. C. S. Lent and P. I. Cohen, Surface Sci., 139:121 (1984).

    Article  ADS  Google Scholar 

  12. M. Henzler, in: “Electron Spectroscopy for Surface Analysis (Topics in Current Physics, Vol 4)”, H. Ibach, ed., Springer, Berlin (1979).

    Google Scholar 

  13. M. G. Lagally, in: “Methods of Experimental Physics: Surfaces”, R. L. Park and M. G. Lagally, eds., Academic, Orlando, FL (1985).

    Google Scholar 

  14. J. M. Cowley, “Diffraction Physics”, North-Holland, Amsterdam (1981).

    Google Scholar 

  15. P. I. Cohen, P. R. Pukite, J. M. Van Hove and C. S. Lent, J. Vac.Sci. Technol., A4:1251 (1986).

    ADS  Google Scholar 

  16. P. R. Pukite, C. S. Lent and P. I. Cohen, Surface Sci., 161:39 (1985).

    Article  ADS  Google Scholar 

  17. F. Hottier, J. B. Theeten, A. Masson and J. L. Domange, Surface Sci., 65:563 (1977).

    Article  ADS  Google Scholar 

  18. T. Hsu, Ultramicroscopy, 11:167 (1983).

    Article  Google Scholar 

  19. D. Saloner, J. A. Martin, M. C. Tringides, D. E. Savage, C. E. Aumann and M. G. Lagally, J. Appl. Phys., 61:2884 (1987).

    Article  ADS  Google Scholar 

  20. P. R. Pukite, S. Batra and P. I. Cohen, Proceedings SPIE., 796 (1987).

    Google Scholar 

  21. M. Henzler and P. Marienhoff, J. Vac. Sci. Technol., B2:346 (1984).

    Google Scholar 

  22. C. S. Lent and P. I. Cohen, Phys. Rev., B33:8329 (1986).

    ADS  Google Scholar 

  23. J. F. Menadue, Acta Cryst., A28:l (1972).

    Google Scholar 

  24. J. J. Harris and B. A. Joyce, Surface Sci., 103:L90 (1981).

    Article  ADS  Google Scholar 

  25. N. Yamamoto and J. H. C. Spence, Thin Solid Films, 104:43 (1983).

    Article  ADS  Google Scholar 

  26. P. I. Cohen, P. R. Pukite and S. Batra, in: “NATO Proceedings on Thin Film Growth”, B. Joyce and J. Venables, eds., Plenum, NY (1987).

    Google Scholar 

  27. R. K. Tsui, J. A. Curless, G. D. Kramer, M. S. Peffley and D. L. Rode, J. Appl. Phys., 58:2570 (1985).

    Article  ADS  Google Scholar 

  28. D. Saluja, P. R. Pukite, S. Batra and P. I. Cohen, J. Vac. Sci.Technol., in press (1987).

    Google Scholar 

  29. G. Gilmer and P. Bennema, in: “Crystal Growth”, P. Hartman, ed., North-Holland, Amsterdam (1973).

    Google Scholar 

  30. T. Sakamoto, N. J. Kawai, T. Nakagawa, K. Ohta and T. Kojima, Appl. Phys. Lett., 47:617 (1985).

    Article  ADS  Google Scholar 

  31. R. Kaplan, Surface Sci., 93:145 (1980).

    Article  ADS  Google Scholar 

  32. J. M. Van Hove and P. I. Cohen, J. Crystal Growth, 50 (1987).

    Google Scholar 

  33. M. Henzler, Appl. Phys., A34:205 (1984).

    ADS  Google Scholar 

  34. A. Y. Cho, J. Vac. Sci. Technol., 8:S31 (1971).

    ADS  Google Scholar 

  35. T.-M. Lu and M. G. Lagally, Surface Sci., 120:47 (1982).

    Article  ADS  Google Scholar 

  36. W. Moritz, these proceedings, p. 175.

    Google Scholar 

  37. M. G. Lagally, D. E. Savage and M. C. Tringides, these proceedings, p. 139.

    Google Scholar 

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Author information

Authors and Affiliations

  1. Department of Electrical Engineering, University of Minnesota, Minneapolis, MN, 55455, USA

    P. R. Pukite, P. I. Cohen & S. Batra

Authors
  1. P. R. Pukite
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  2. P. I. Cohen
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  3. S. Batra
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Editor information

Editors and Affiliations

  1. Philips Research Laboratories, Eindhoven, The Netherlands

    P. K. Larsen

  2. Philips Research Laboratories, Redhill, UK

    P. J. Dobson

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© 1988 Plenum Press, New York

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Pukite, P.R., Cohen, P.I., Batra, S. (1988). The Contribution of Atomic Steps to Reflection High Energy Electron Diffraction from Semiconductor Surfaces. In: Larsen, P.K., Dobson, P.J. (eds) Reflection High-Energy Electron Diffraction and Reflection Electron Imaging of Surfaces. NATO ASI Series, vol 188. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-5580-9_31

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  • DOI: https://doi.org/10.1007/978-1-4684-5580-9_31

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4684-5582-3

  • Online ISBN: 978-1-4684-5580-9

  • eBook Packages: Springer Book Archive

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