Abstract
In recent years the progress in LSI (Laser Stimulated Implanation) and VLSI has brought about great advances in the field of electronics and there has been a tremendous growth of their industrial production and scientific research (see Figure 1). The main source of these achievements is the steady improvement in the basic silicon technology.
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© 1983 Plenum Press, New York
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Wang, Sj. (1983). Silicon Technology and its Applications in Microelectronics. In: Riazuddin, Qadir, A. (eds) Physics and Contemporary Needs. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-4139-0_1
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DOI: https://doi.org/10.1007/978-1-4684-4139-0_1
Publisher Name: Springer, Boston, MA
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