Abstract
Superconducting films of Y1Ba2Cu3O7−δ were produced by a radio frequency (RF) plasma aerosol evaporation technique at atmospheric pressure. Aqueous solutions of the ions were generated as an aerosol and the mist was injected into the plasma region, and then deposited onto substrates outside of both the plasma and flame regions. The substrate temperature was 600–650°C. The deposition rate is 0.001–100 μm/(min) cm2, and the film thickness is 1–200 μm. After post annealing in flowing oxygen (800–880 °C, 0.5–2 hrs.), films become superconductive. For a film on a single crystalline MgO substrate (100), the onset temperature of the superconducting transition is 105K, with a transition width (10%–90%) of 6K, and zero resistance at 91K. Since this technique does not require a vacuum environment it has potential for large scale production of thin films.
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© 1990 Plenum Press, New York
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Wang, X.W., Zhong, H.H., Snyder, R.L. (1990). Superconducting Y1Ba2Cu3O7−δ Films by RF Plasma Aerosol Evaporation at Atmospheric Pressure. In: McConnell, R.D., Noufi, R. (eds) Science and Technology of Thin Film Superconductors 2. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-1345-8_46
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DOI: https://doi.org/10.1007/978-1-4684-1345-8_46
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