Abstract
The ability to achieve inexpensive, large-scale production of high Tc superconducting thin films superconducting oxide films in-situ at low temperature is very crucial for device fabrications. Such process should permit the deposition of high quality HTSC films with a smooth surfaces on technologically important substrates such as sapphire and Si.
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© 1990 Plenum Press, New York
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Zhao, J. et al. (1990). Low Temperature Fabrication Of YBa2Cu3O7−x High-Tc Superconducting Thin Films By Plasma-Enhanced Metalorganic Chemical Vapor Deposition. In: McConnell, R.D., Noufi, R. (eds) Science and Technology of Thin Film Superconductors 2. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-1345-8_32
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DOI: https://doi.org/10.1007/978-1-4684-1345-8_32
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