Abstract
High quality superconducting YBCO thin films were fabricated using a laser deposition technique. The depositions were made in a diffusion pumped vacuum system with an excimer laser, operating at 248 nm wavelength, and a high density target. The films were formed on heated substrates in a flow of oxygen gas at a pressure of 0.2 mbar.
A series of films were deposited on MgO substrates at different temperatures, and the optimum temperature was found to be 765 ± 10 °C at the substrate holder. The best films had critical temperatures above 90 K (highest measured value was 92.5 ± 1 K), and critical currents of 106 A/cm2 at 77 K. X-ray diffractograms of these films are dominated by strong c-axis peaks, but (0k0) peaks can also be seen.
SEM pictures showed that the typical film surface consists of larger grains distributed on a comparatively smooth background. The surface morphology depended strongly on substrate temperature.
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© 1990 Plenum Press, New York
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Brorsson, G., Ivanov, Z., Nilsson, PÅ. (1990). In Situ YBCO thin Films Made by Laser Deposition. In: McConnell, R.D., Noufi, R. (eds) Science and Technology of Thin Film Superconductors 2. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-1345-8_26
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DOI: https://doi.org/10.1007/978-1-4684-1345-8_26
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4684-1347-2
Online ISBN: 978-1-4684-1345-8
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