Abstract
Several processes are proposed for the deposition of the high-Tc superconductors of the layered perovskite including cathodic sputtering [1], reactive evaporation [2], chemical vapor deposition [3], and laser beam deposition [4]. Among these processes the cathodic sputtering is now widely used not only for the deposition of the high-Tc thin films but for the microfabrication of the high-Tc thin film electronic devices.
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© 1990 Plenum Press, New York
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Wasa, K. et al. (1990). Cathodic Sputtering as a Tool for the High-Tc Superconducting Materials Processing. In: McConnell, R.D., Noufi, R. (eds) Science and Technology of Thin Film Superconductors 2. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-1345-8_1
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DOI: https://doi.org/10.1007/978-1-4684-1345-8_1
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