Abstract
The measurement of the thickness of thin films is usually of great importance for examining the properties of the films, as it is the very thinness which often gives rise to the properties which cause the film to be different from those of bulk materials. As a result various summaries have been given previously of the techniques available(1)(2).
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Campbell, D.S. (1976). Thickness Measurements. In: Dupuy, C.H.S., Cachard, A. (eds) Physics of Nonmetallic Thin Films. NATO Advanced Study Institutes Series, vol 14. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-0847-8_7
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DOI: https://doi.org/10.1007/978-1-4684-0847-8_7
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