Abstract
The purpose of microelectronics is to associate together several physical phenomena to realize a function, a logical or analogical function. Let me mention for example, diode phenomena, injection of current between each side of a barrier, field effect in the bulk of a semiconductor (the field effect transistor), field effect near by surfaces of a semiconductor (the metal oxyde semiconductor field effect transistor), conduction in insulating layers etc… The well known bipolar transistor is an example of such device as well as the MOS field effect transistor which are examples of combination of several and different physical phenomena to obtain a particular device.
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© 1976 Plenum Press, New York
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Le Goascoz, V. (1976). Thin Film Applications in Microelectronics. In: Dupuy, C.H.S., Cachard, A. (eds) Physics of Nonmetallic Thin Films. NATO Advanced Study Institutes Series, vol 14. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-0847-8_15
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DOI: https://doi.org/10.1007/978-1-4684-0847-8_15
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