Abstract
Vacuum is crucial to the proper operation of an electron microscope since electrons, the illumination source, are easily deflected by molecules of gas and thus are lost to the image-forming process. In order to have a working understanding of the vacuum system, it is necessary to examine the different types of vacuum sensors (gauges) and vacuum pumps utilized in electron microscopy. This is especially important because various gauges and pumps can sustain damage if connected to the system being evacuated at an improper vacuum level.
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References
O’Hanlon, J.F. 1980. A user’s guide to vacuum technology. John Wiley and Sons, New York.
Stuart, R.V. 1983. Vacuum technology, thin films, and sputtering. An introduction. Academic Press, Orlando
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© 1992 Michael J. Dykstra
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Dykstra, M.J. (1992). Vacuum Systems. In: Biological Electron Microscopy. Springer, Boston, MA. https://doi.org/10.1007/978-1-4684-0010-6_6
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DOI: https://doi.org/10.1007/978-1-4684-0010-6_6
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4684-0012-0
Online ISBN: 978-1-4684-0010-6
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