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Design of New Materials pp 95–120Cite as

Synthesis of Ceramic Powders and Thin Films from Laser Heated Gases

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Abstract

Two laser initiated gas phase synthesis processes have been developed and the characteristics of resulting materials related to process variables; highly perfect ceramic powders are made in one and thin films in the other. Both were developed because they permit unusual reaction conditions to be achieved with great precision and thereby produce superior reaction products.

Silicon, SiC and Si3N4 powders principally have been made from appropriate combinations of SiH4, CH3SiH3, NH3, CH4 and C2H6 laser heated reactants. Particle size, agglomeration, crystallinity and stoichiometry can be controlled with the process which has been modelled with respect to nucleation and growth kinetics. Manufacturing costs of these powders appear acceptable for high quality structural ceramics.

Thin-films of amorphous hydrogenated silicon (a-Si:H) and Si3N4 have been made by operating under conditions where heterogeneous rather than homogenous nucleation occurs. The virtually unique combination of high gas temperatures and low substrate temperatures permits rapid deposition rates and controlled film properties. Resulting films have demonstrated superior electrical, optical, structural and mechanical properties.

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Authors and Affiliations

  1. Energy Laboratory and Materials Science and Engineering, Massachusetts Institute of Technology, Cambridge, MA, 02139, USA

    John S. Haggerty

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Editors and Affiliations

  1. Texas A&M University, College Station, Texas, USA

    David L. Cocke (Associate Professor of Chemistry, Program Co-Chair, 1986 IUCCP Research Symposium) & Abraham Clearfield (Professor of Chemistry, Program Co-Chair, 1986 IUCCP Research Symposium) (Associate Professor of Chemistry, Program Co-Chair, 1986 IUCCP Research Symposium) &  (Professor of Chemistry, Program Co-Chair, 1986 IUCCP Research Symposium)

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© 1987 Plenum Press, New York

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Haggerty, J.S. (1987). Synthesis of Ceramic Powders and Thin Films from Laser Heated Gases. In: Cocke, D.L., Clearfield, A. (eds) Design of New Materials. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-9501-4_6

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  • DOI: https://doi.org/10.1007/978-1-4615-9501-4_6

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