Instrumentation for Energy-Loss Spectroscopy
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The intensity J(x, y) or J(θ x , θ y ), for a given value of E or a specified range of energy loss. These data correspond to an energy-filtered image or diffraction pattern, and can be obtained using either scanning-beam (STEM) or fixed-beam (CTEM) techniques, as discussed in Section 2.4.
The intensity J(E) at a given point on the specimen or, more precisely, ∫ J(E) dx dy, where the limits of integration are defined by x2 + y2 = d2/4, d being the diameter of the incident beam. Here were are referring to energy-loss spectroscopy (or energy analysis) carried out using a double-focusing spectrometer such as the magnetic prism (Sections 2.1.1 and 2.2).
The intensity J(y, E) for a fixed value of the spatial coordinate x, or J(θ y , E) for a given θ x . This involves energy analysis along a line drawn through the specimen or its diffraction pattern and requires a spectrometer which focuses only in the direction of dispersion, such as the Möllenstedt analyzer (Section 2.1.4) or the Wien filter (Section 2.1.3).
KeywordsEnergy Resolution Wien Filter Chromatic Aberration Fringe Field Readout Noise
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