Abstract
We review the techniques of in-situ transmission electron microscopy during thin film growth. The method has value because it permits visualization both of surface structure and internal film microstructure. This allows association between these two critical features in thin film growth. Although examples are mainly included from the work of the author, there is a brief review of other work in the past and at present.
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References
D. J. Smith, J. Vac. Sci. Technol. B 3, 1563–1567 (1985).
P. Hirsch, A. Howie, R. Nicholson, et al., Electron Microscopy of Thin Crystals (Krieger, Malabar, Florida, 1977).
D. Cherns, Philos. Mag. 30, 549 (1974).
S. R. Andrews and R. A. Cowley, J. Phys. C 18, 6427 (1985).
D. Lynch, Acta Cryst. A 27, 399 (1971).
J. M. Gibson, X. Chen, and O. Pohland, Surface Reviews and Letters in press (1997).
X. Chen and J. M. Gibson, Phys. Rev. B 54, 2846 (1996).
J. R. Heffelfinger, M. W. Bench, and C. C. B, Surf. Sci. 343, L1161–6 (1995).
X. Chen and J. M. Gibson, Appl. Phys. Lett. 70, 1462–1464 (1997).
K. Takayanagi, Y. Tanishiro, S. Takahashi, et al., Surf. Sci. 164, 367 (1985).
R. D. Twesten and J. M. Gibson, Ultramic. 53, 223–235 (1994).
L. D. Marks and R. Plass, Phys. Rev. Lett. 75, 2172–5 (1995).
L. M. Peng and M. J. Whelan, Acta Cryst A47, 101–109 (1991).
D. Loretto, J. M. Gibson, and S. M. Yalisove, Phys. Rev. Lett. 63, 298–301 (1989).
J. M. Gibson, H. J. Gossmann, J. C. Bean, et al., Phys. Rev. Lett. 56, 355–358 (1986).
K. Yagi, A. Yamanak, H. Sato, et al., Prog. Theor. Phys. Suppl. 106, 303 (1991).
R. D. Twesten and J. M. Gibson, Phys. Rev. B 50, 17628 (1994).
J. Stewart, O. Pohland, and J. M. Gibson, Phys. Rev. B 49, 13848–58 (1994).
T. I. Kamins, E. C. Carr, R. S. Williams, et al., J. Appl. Phys. 81, 211–19 (1997).
J. M. Gibson, J. L. Batstone, and R. T. Tung, Appl. Phys. Lett. 51, 45–7 (1987).
G. A. Bassett, in Int. Symp. on Condensation and Evaporation of Solids, edited by E. Rutner, P. Goldfinger and J. Hirth (Gordon and Breah, 1962), p. 599.
D. W. Pashley and M. J. Stowell, J. Vac. Sci. Tech. 3, 156 (1966).
G. Honjo and K. Yagi, J. Vac. Sci. Tech. 6, 576 (1969).
R. J. Wilson and P. M. Petroff, Rev. Sci. Instrum. 54, 534 (1983).
M. L. McDonald, J. M. Gibson, and F. C. Unterwald, Rev. Sci. Instrum. 60, 700–7 (1989).
P. R. Swan, J. S. Jones, O. L. Krivanek, et al., in 45th Annual EMSA Meeting, edited by G. W. Bailey (San Francisco Press, 1987).
L. D. Marks, M. Kubozoe, M. Tomita, et al., in 46th Annual EMSA Meeting (San Francisco Press, 1988), p. 658.
M. Hammar, F. K. LeGoues, J. Tersoff, et al., Surf. Sci. 349, 129 (1996).
M. T. Marshall, M. L. McDonald, X. Tong, et al., Rev. Sci. Instrum. submitted (1997).
M. Hammar, F. K. LeGoues, J. Tersoff, et al., Surf. Sci. 349, 129–44 (1996).
T. Yodo, M. Tamura, M. Tomita, et al., Jpn. J. Appl. Phys. 34, L491–494 (1995).
R. T. Tung and J. M. Gibson, J. Vac. Sci. Tech. A 3, 9870991 (1984).
G. P. Das, P. Blochl, A. O. K, et al., Phys. Rev. Lett. 63, 1168 (1989).
J. M. Gibson, J. L. Batstone, R. T. Tung, et al., Phys. Rev. Lett. 60, 1158–61 (1988).
R. H. Milne and A. Howie, Phil. Mag. A 49, 665–682 (1984).
J. C. Yang and J. M. Gibson, Appl. Phys. Lett. in press (1997).
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Gibson, J.M. (1997). In-Situ Transmission Electron Microscopy of Thin Film Growth. In: Gai, P.L. (eds) In-Situ Microscopy in Materials Research. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-6215-3_7
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DOI: https://doi.org/10.1007/978-1-4615-6215-3_7
Publisher Name: Springer, Boston, MA
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