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Environmental Scanning Electron Microscopy

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In-Situ Microscopy in Materials Research

Abstract

Following early works on in-situ transmission electron microscopy by using environmental cells, the environmental scanning electron microscope (ESEM) has formed the counterpart for the examination of specimen surfaces in a gaseous environment at pressures up to one atmosphere. As accelerating voltages are relatively low in ESEM, it has been necessary to establish the optimum electron beam transfer conditions from a high vacuum to a high pressure region by using windowless apertures. Studies on the gas and electron dynamics of the system have determined that it is possible to use tungsten, LaB6 and field emission guns without compromising the useful probe size in the presence of gas. The backscattered electron, cathodoluminescence and x-ray detection modes are preserved with proper modification of the detectors. A new method for detection of the secondary and backscattered electron signal has been introduced by the use of the ionisation and scintillation of the environmental gas by corresponding signals. Further, the ionised gaseous environment substitutes the conventional conductive coating or treatment techniques necessary for insulators in vacuum SEM. The high pressure also allows a fully or partially moist environment for the examination of biological or wet specimens, or of chemical reactions in the gas/liquid/solid phases. The possibility of examining the natural or true surface of practically any specimen has added a new dimension to electron microscopy. New contrast mechanisms reveal information not previously possible to see. It has greatly facilitated the examination of specimens by eliminating or reducing the specimen preparation procedures and the specimen exchange time. Based on the success of an experimental ESEM, new commercial instruments are now available making this technology accessible to all. Published scientific literature demonstrates that ESEM has been applied to the most diverse disciplines. A future prospect is to integrate and jointly develop the scanning transmission electron microscope towards a universal kind of environmental EM.

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Author information

Authors and Affiliations

  1. ESEM Research Laboratory, Sydney, NSW, 2026, Australia

    Gerasimos Daniel Danilatos

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  1. Gerasimos Daniel Danilatos
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Editors and Affiliations

  1. Central Research and Development, Science and Engineering Laboratories, DuPont, Experimental Station, Wilmington, Deleware, 19880-0356, USA

    Pratibha L. Gai

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© 1997 Springer Science+Business Media New York

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Danilatos, G.D. (1997). Environmental Scanning Electron Microscopy. In: Gai, P.L. (eds) In-Situ Microscopy in Materials Research. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-6215-3_2

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  • DOI: https://doi.org/10.1007/978-1-4615-6215-3_2

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-0-7923-9989-6

  • Online ISBN: 978-1-4615-6215-3

  • eBook Packages: Springer Book Archive

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