Abstract
Electrical actuation in its electrostatic form relies on the coulombic attraction of oppositely charged material bodies. This mechanism has been known for a long time and coulombic actuators, in their simplest form, rely on the attraction of two charged plates or mechanical objects [1–6]. The force that can be produced by an electrostatic actuator is discussed in detail later in this chapter.
Keywords
- Cantilever Beam
- Piezoelectric Material
- Piezoelectric Actuator
- Piezoelectric Layer
- Spatial Light Modulator
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.
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Tabib-Azar, M. (1998). Electrical Microactuators. In: Microactuators. Electronic Materials: Science and Technology, vol 4. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-5445-5_2
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