Silicon Process Flow: ZnO actuator and piezoresistive sensor

Abstract

This chapter provides a step by step process for fabricating the ZnO cantilever. We begine by determining values for the piezoresistive coefficient for different doping levels. This is most easily done using the tables published by Kanda^l. Figure8.1.1a is the plot of piezoresistive coefficients for the different orientations of silicon. We are primarily concerned with (110) orientation in the top half of the figure, which gives the longitudinal coefficient, when the current and stress are in the same direction. Figure 8.1.1b gives a modifier, which depends on doping and temperature, to the result in found in Figure 8.l.la.