Conclusion and Outlook
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In this thesis the feasibility of a miniaturized ultrasound barrier system for object detection and of a proximity sensor for distance measurement has been demonstrated In the developed prototypes, silicon micromachined membrane resonators generate and detect the ultrasound waves. The transducers were fabricated using either an industrial CMOS process or a pressure sensor process in combination with standard silicon micromachining techniques. The waferwise batch fabrication allows a cost effective mass production of the transducer elements.
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