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This Chapter covers the mechanical characteristics of the silicon membrane resonators. In the first two Sections the different modes of the resonant membranes are investigated. This includes the dependence of resonance frequency, vibration amplitude, mode shape, and static bending of the membrane on the membrane geometry. Since the resonators are employed as a transducer element in an ultrasound sensor, the sound pressure generated by the vibrating membrane has to be analyzed (Section 4.3). In Section 4.4 the geometry of the membrane resonator is optimized with respect to the generated sound pressure. Furthermore, to ensure the industrial applicability of the transducer elements the long term stability under harsh environmental conditions is investigated (Section 4.6). Finally, the membrane resonators fabricated with two different fabrication processes are compared (Section 4.5).
KeywordsResonance Frequency Mode Shape Sound Pressure Vibration Amplitude Frequency Drift
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