Design Considerations For Silicon Resonators

Part of the Microsystems book series (MICT, volume 4)


In order to optimize the membrane resonators for the application of proximity sensing, not only its dimensions and material properties can be modified but also the complete system of resonator and housing. To do this, a basic understanding of the system behavior is indispensable. The following Chapter summarizes basic design considerations for the proximity sensor microsystem. The first Section gives a short overview of the basic behavior of a resonating membrane microstructure. The second Section explains how the membrane vibrations are excited and how these vibrations are simultaneously detected. The most important aspect for an acoustic system, the sound generation, is discussed in the last Section. To obtain an efficient sound radiation, we consider not only the transducer element itself but also the housing geometry, which can improve or disturb the radiation efficiency.


Sound Pressure Design Consideration Sound Generation Sound Field Fundamental Resonance Frequency 
These keywords were added by machine and not by the authors. This process is experimental and the keywords may be updated as the learning algorithm improves.


Unable to display preview. Download preview PDF.

Unable to display preview. Download preview PDF.

Copyright information

© Springer Science+Business Media New York 1999

Authors and Affiliations

  1. 1.ETHZurichSwitzerland

Personalised recommendations