Abstract
In this work, the design, fabrication and testing of advanced silicon micromachined cantilevers for high-density AFM thermomechanical data storage was accomplished. Three types of cantilevers were fabricated to provide the functionality of three major components in a AFM thermomechanical data storage system: a vertically sensitive readback sensor, a thermal writing head, and a tracking mechanism based on a lateral force sensor. These three components are based on micromachined elements with integrated sensing/heating capability, and eliminates the need for bulky external accessories such as lasers. The results of this work represent a major step towards the development of a compact, low-cost, high-density data storage device.
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© 1999 Springer Science+Business Media New York
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Chui, B.W. (1999). Conclusion and future work. In: Microcantilevers for Atomic Force Microscope Data Storage. Microsystems, vol 1. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-4983-3_7
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DOI: https://doi.org/10.1007/978-1-4615-4983-3_7
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4613-7262-2
Online ISBN: 978-1-4615-4983-3
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