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Structural characterization of self-organized Ge islands

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Part of the book series: Electronic Materials Series ((EMAT,volume 6))

Abstract

Coherent island formation in the SiGe material system has been studied for a number of years [1,2]. The lattice mismatch of 4.2% allows the fabrication of islands with diameters ranging from about 100 to 2,500Å.

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References

  1. D. J. Eaglesham and M. Cerullo, Phys. Rev. Lett. 64, 1943 (1990).

    Article  CAS  Google Scholar 

  2. Y.-W. Mo, D. E. Savage, B. S. Swartzentruber, and M. G. Lagally, Phys. Rev. Lett. 65, 1020 (1990).

    Article  CAS  Google Scholar 

  3. N. N. Ledentsov, Proc. 8th Int. Conf. on the Physics of Narrow Gap Semiconductors (Shanghai, 1997), World Scientific (Singapore, 1998).

    Google Scholar 

  4. O. G. Schmidt, C. Lange, K. Eberl, O. Kienzle, and F. Ernst, Appl. Phys. Lett. 71, 2340 (1997).

    Article  CAS  Google Scholar 

  5. R. Apetz, L. Vescan, A. Hartmann, C. Dieker, and H. Lüth, Appl. Phys. Lett. 66, 445 (1995).

    Article  CAS  Google Scholar 

  6. See, e.g., H. Sunamura, N. Usami, Y. Shiraki, and S. Fukatsu, Appl. Phys. Lett. 66, 3024 (1995).

    Article  CAS  Google Scholar 

  7. See, e.g., P. Schittenhelm, M. Gail, J. Brunner, J. F. Nützel, and G. Abstreiter, Appl. Phys. Lett. 67, 1292 (1995).

    Article  CAS  Google Scholar 

  8. P. Schittenhelm, G. Abstreiter, A. Darhuber, G. Bauer, P. Werner, and A. Kosogov, Thin Solid Films 294, 291 (1997).

    Article  CAS  Google Scholar 

  9. C. K. Seal, D. Samara, and S. K. Banerjee, Appl. Phys. Lett. 71, 3564 (1997).

    Article  CAS  Google Scholar 

  10. P. Schittenhelm, Ph.D. thesis, Walter Schottky Institut, Technical University Munich (1997).

    Google Scholar 

  11. J. Tersoff, C. Teichert, and M. G. Lagally, Phys. Rev. Lett. 76, 1675 (1996); C. Teichert, M. G. Lagally, L. J. Peticolas, J. C. Bean, and J. Tersoff, Phys. Rev. B 53, 16334 (1996).

    Article  CAS  Google Scholar 

  12. Q. Xie, A. Madhukar, P. Chen, and N. P. Kobayashi, Phys. Rev. Lett. 75, 2542 (1995).

    Article  CAS  Google Scholar 

  13. C. Teichert, Y. H. Phang, L. J. Peticolas, J. C. Bean, and M. G. Lagally, Surface Diffusion: Atomistic and Collective Processes, edited by M. C. Tringides, NATO ASI Series (Plenum Press, New York, 1997).

    Google Scholar 

  14. V. Holý, J. Stangl, S. Zerlauth, G. Bauer, N. Derowski, D. Lübbert, and U. Pietsch, J. Phys. D: Appl. Phys. 32, A234 (1999).

    Article  Google Scholar 

  15. V. Holý, A. A. Darhuber, J. Stangl, G. Bauer, J. Nützel, and G. Abstreiter, Phys. Rev. B 57, 12435 (1998).

    Article  Google Scholar 

  16. Feng Liu, J. Tersoff, and M. G. Lagally, Phys. Rev. Lett. 80, 1268 (1998).

    Article  CAS  Google Scholar 

  17. J. Zhu, K. Brunner, and G. Abstreiter, Appl. Phys. Lett. 73, 620 (1998).

    Article  CAS  Google Scholar 

  18. C. Teichert, J. Tersoff, and M. G. Lagally, in Morphological Organization in Epitaxial Growth and Removal, edited by Z. Zhang and M. G. Lagally (World Scientific, Singapore, 1998, in press).

    Google Scholar 

  19. F. Liu and M. G. Lagally, Surf. Sci. 386, 169 (1997).

    Article  CAS  Google Scholar 

  20. S. K. Theiss, D. M. Chen, and J. A. Golovchenko, Appl. Phys. Lett. 66, 448 (1995).

    Article  CAS  Google Scholar 

  21. B. Voigtländer and A. Zinner, Appl. Phys. Lett. 63, 3055 (1993).

    Article  Google Scholar 

  22. A. O. Kosogov, P. Werner, U. Gösele, N. N. Ledentsov, D. Bimberg, V. M. Ustinov, A. Yu. Egorov, A. E. Zhukov, P. S. Kop’ev, N. A. Bert, and Zh. I. Alferov, Appl. Phys. Lett. 69, 3072 (1996).

    Article  CAS  Google Scholar 

  23. E. Mateeva, P. Sutter, J. C. Bean, and M. G. Lagally, Appl. Phys. Lett. 71, 3233 (1997).

    Article  CAS  Google Scholar 

  24. S. Ruvimov and K. Scheerschmidt, Phys. Stat. Sol. (a) 150, 471 (1995).

    Article  CAS  Google Scholar 

  25. G. Abstreiter, P. Schittenhelm, C. Engel, E. Silveira, A. Zrenner, D. Meertens, and W. Jäger, Semicond. Sci. Technol 11, 1521 (1996).

    Article  CAS  Google Scholar 

  26. S. Fukatsu, H. Sunamura, Y. Shiraki, and S. Komiyama, Appl. Phys. Lett. 71, 258 (1997).

    Article  CAS  Google Scholar 

  27. P. D. Persans, P. W. Deelman, K. L. Stokes, L. J. Schowalter, A. Byrne, and T. Thundat, Appl. Phys. Lett. 70, 472 (1997).

    Article  CAS  Google Scholar 

  28. M. I. Alonso and K. Winer, Phys. Rev. B 39, 10056 (1989).

    Article  CAS  Google Scholar 

  29. F. Cerdeira, A. Pinczuk, J. C. Bean, B. Batlogg and B. A. Wilson, Appl. Phys. Lett. 45, 1138 (1984).

    Article  CAS  Google Scholar 

  30. J.-M. Baribeau, J. Cryst Growth 157, 52 (1995).

    Article  CAS  Google Scholar 

  31. A. A. Williams, J. M. C. Thornton, J. E. Macdonald, R. G. van Silfhout, J. E van der Veen, M. S. Finney, A. D. Johnson, and C. Norris, Phys. Rev. B 43, 5001 (1991).

    Article  CAS  Google Scholar 

  32. A. J. Steinfort, P. M. Schölte, A. Ettema, F. Tuinstra, M. Nielsen, E. Landemark, D.-M. Smilgies, R. Feidenhans’l, G. Falkenberg, L. Seehofer, and R. L. Johnson, Phys. Rev. Lett. 77, 2009 (1996).

    Article  CAS  Google Scholar 

  33. V. Holý and T. Baumbach, Phys. Rev. B 49, 10668 (1994).

    Article  Google Scholar 

  34. A. A. Darhuber, P. Schittenhelm, V. Holý, J. Stangl, G. Bauer, and G. Abstreiter, Phys. Rev. B 55, 15652 (1997).

    Article  CAS  Google Scholar 

  35. U. Pietsch, H. Metzger, S. Rugel, B. Jenichen, and I. K. Robinson, J. Appl. Phys. 74, 2381 (1993).

    Article  CAS  Google Scholar 

  36. G. T. Baumbach, S. Tixier, U. Pietsch, and V. Holý, Phys. Rev. B 51, 16848 (1995).

    Article  CAS  Google Scholar 

  37. A. A. Darhuber, V. Holý, P. Schittenhelm, J. Stangl, I. Kegel, Z. Kovats, T. H. Metzger, G. Bauer, G. Abstreiter, and G. Grübel, Physica E 2, 789 (1998).

    Article  CAS  Google Scholar 

  38. V. Holý, A. A. Darhuber, J. Stangl, S. Zerlauth, F. Schäffler, G. Bauer, N. Darowski, D. Lübbert, U. Pietsch, and I. Vavra, Phys. Rev. B 58, 7934 (1998).

    Article  Google Scholar 

  39. I. Kegel, T. H. Metzger, P. Fratzl, J. Peisl, A. Lorke, J. M. Garcia, and P. M. Petroff, Emophys. Lett. 45, 222 (1999).

    Article  CAS  Google Scholar 

  40. M. Schmidbauer, T. Wiebach, H. Raidt, M. Hanke, R. Köhler, and H. Wawra, Phys. Rev. B 58, 10523 (1998).

    Article  CAS  Google Scholar 

  41. G. Medeiros-Ribeiro, A. M. Bratkovski, T. I. Kamins, D. A. A. Ohlberg, and R. S. Williams, Science 279, 353 (1998).

    Article  CAS  Google Scholar 

  42. S. Christiansen, M. Albrecht, H. P. Strunk, and H. J. Maier, Appl. Phys. Lett. 64, 3617 (1994).

    Article  CAS  Google Scholar 

  43. K. Eberl and W. Wegscheider, Handbook of Semiconductors, Vol. 3a, edited by P. S. Moss (Elsevier Science, Amsterdam 1994), p. 595.

    Google Scholar 

  44. P. Schittenhelm, C. Engel, F. Findeis, G. Abstreiter, A. A. Darhuber, G. Bauer, A. O. Kosogov, and P. Werner, J. Vac. Sci. Technol. B 16, 1575 (1998).

    Article  CAS  Google Scholar 

  45. K. Brunner, W. Winter, and K. Eberl, Appl. Phys. Lett. 69, 1279 (1996).

    Article  CAS  Google Scholar 

  46. K. Eberl, O. G. Schmidt, S. Schieker, N. Y. Jin-Phillip, and F. Phillipp, Solid-State Electron. 42, 1593 (1998).

    Article  CAS  Google Scholar 

  47. O. G. Schmidt, S. Schieker, K. Eberl, O. Kienzle, and F. Ernst, Appl. Phys. Lett. 73, 659 (1998).

    Article  CAS  Google Scholar 

  48. J. Bevk, A. Ourmazd, L. C. Feldman, T. P. Pearsall, J. M. Bonar, B. A. Davidson, and J. P. Mannaerts, Appl. Phys. Lett. 50, 760 (1987).

    Article  CAS  Google Scholar 

  49. O. Kienzle, private communication.

    Google Scholar 

  50. M. Strassburg, V. Kutzer, U. W. Pohl, A. Hoffmann, I. Broser, N. Ledentsov, D. Bimberg, A. Rosenauer, U. Fischer, D. Gerthsen, I. L. Krestnikov, M. V. Maximov, P. S. Kop’ev, and Zh. I. Alferov, Appl. Phys. Lett. 72, 942 (1998).

    Article  CAS  Google Scholar 

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Darhuber, A.A., Bauer, G., Schittenhelm, P., Abstreiter, G. (2000). Structural characterization of self-organized Ge islands. In: Pearsall, T.P. (eds) Quantum Semiconductor Devices and Technologies. Electronic Materials Series, vol 6. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-4451-7_6

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  • DOI: https://doi.org/10.1007/978-1-4615-4451-7_6

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