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Thermalization and Transport of Sputtered Particles in Glow Discharges

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Nonequilibrium Processes in Partially Ionized Gases

Part of the book series: NATO ASI Series ((NSSB,volume 220))

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Abstract

A typical and important problem of nonequilibrium gas dynamics is the fate of the high energy particles sputtered from the cathode in a gas discharge. Sputtered particles leave the cathode with energies of the order of 10 eV which is 2 orders of magnitudes higher than the thermal energy of an atom in the gas discharge. Due to collisions with gas atoms they lose energy and may thermalize in the gas discharge. The properties of sputtered particles are of fundamental interest for the technology of thin film deposition by glow discharge sputtering [1].

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Author information

Authors and Affiliations

  1. Institut für Theoretische Physik, TU PO Box 3329, D-3300, Braunschweig, Germany

    K. T. Waldeer & H. M. Urbassek

  2. Departament de Fisica, Universitat d’Alacant, Apt. 99, E-03080, Alacant, Spain

    A. Gras-Marti & J. A. Vallés-Abarca

Authors
  1. K. T. Waldeer
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  2. H. M. Urbassek
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  3. A. Gras-Marti
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  4. J. A. Vallés-Abarca
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Editor information

Editors and Affiliations

  1. Department of Chemistry and Centro di Studio per la Chimica dei Plasmi del CNR, University of Bari, Bari, Italy

    Mario Capitelli

  2. Lawrence Livermore National Laboratory, Livermore, California, USA

    J. Norman Bardsley

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© 1990 Springer Science+Business Media New York

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Waldeer, K.T., Urbassek, H.M., Gras-Marti, A., Vallés-Abarca, J.A. (1990). Thermalization and Transport of Sputtered Particles in Glow Discharges. In: Capitelli, M., Bardsley, J.N. (eds) Nonequilibrium Processes in Partially Ionized Gases. NATO ASI Series, vol 220. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-3780-9_50

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  • DOI: https://doi.org/10.1007/978-1-4615-3780-9_50

  • Publisher Name: Springer, Boston, MA

  • Print ISBN: 978-1-4613-6685-0

  • Online ISBN: 978-1-4615-3780-9

  • eBook Packages: Springer Book Archive

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