Abstract
The measurement of electron energy distribution function (EEDF) in RF discharges is a topic of great interest for understanding the processes taking place in a kind of discharge where sheath processes and inelastic and superelastic collisions are thought to play a fundamental role in shaping the EEDF, giving to it a pronounced non-maxwellian character as well as a noticeable spatial dependence /1/.
Access this chapter
Tax calculation will be finalised at checkout
Purchases are for personal use only
Preview
Unable to display preview. Download preview PDF.
References
M.J. Kushner, IEEE Trans. on Plasma Sci.,PS-14 n 2 (1986) 188
M.B. Hopkins, W.C. Graham T.J. Griffin, Rev. Sci. Instrum., 58 (1987) 475
G. Dilecce, S. De Benedictis, M. Capitelli and C. Gorse, Contr. Papers ICPIG-19, Belgrade 1989; Contr. Papers ISPC-9, Pugnochiuso 1989
A. Garscadden, K.G. Emeleus, Proc. Phys.Soc.(London), 78 (1962) 535
A. Boschi, F. Magistrelli, Nuovo Cimento, 29 (1963) 487
K. Matsumoto, M. Sato, Contr. Papers ICPIC-15, Minsk, 1981 p 1001
S. Klagge, M. Maas, Beitr. Plasmaphys., 23 (1983) 355
H. Sabadil, S. Klagge, Contr. Papers ICPIG-17, Budapest, 1985 p 322
N.St.J. Braithwaite, N.M.P. Benjamin, J.E. Allen, J. Phys. E: Sci. Instr., 20 (1987) 1046
R.R.J. Gagné, A. Cantin, J. Appl. Phys., 43 (1972) 2639
V.A. Godyak, O.A. Popov, Soy. Phys. Tech. Phys., 22 (1977) 461
M.B. Hopkins, C.A. Anderson, W.G. Graham, Europhys. Lett., 8 (1989) 141
N.L.S. Martin, A. von Engel, J. Phys. D, 10 (1977) 868
K.G. Emeleus, Int. J. Electronics, 47 (1979) 97
E.P. Szuszczewicz, J.C. Holmes, J. Appl. Phys., 46 (1975) 5134
H.E. Farnsworth, Phys. Rev., 25 (1925) 41
K. Wiesemann, Z. Physik, 219 (1969) 462
R. Mewe, Physica, 46 (1970) 626
H.D. Hagstrum, Phys. Rev. 89 (1953) 244; 91 (1953) 543; 96 (1954) 325; 104 (1956) 672
W. Domcke, L.S. Cedermann, Phys. Rev. A, 16 (1977) 1465
J.G. Laframboise, L.W. Parker, Phys. Fluids 16 (1973) 629
S.D. Hester, A.A. Sonin, Phys. Fluids, 13 (1970) 1265
P.M. Chung, L. Talbot, K.J. Touryan, Electric Probes in Stationary and Flowing Plasmas, Springer-Verlag 1975, p. 27
J.E. Allen, R.L.F. Boyd, P. Reynolds, Proc. Phys. Soc. B, 70 (1957) 297
F. Chen, J. Nucl. Ener. Part C, 7 (1965) 47
M.W. Allen, B.M. Annaratone, J.E. Allen, Contr. Papers Gas Discharges and their Applications, Venezia 1988
Author information
Authors and Affiliations
Editor information
Editors and Affiliations
Rights and permissions
Copyright information
© 1990 Springer Science+Business Media New York
About this chapter
Cite this chapter
Dilecce, G., Capitelli, M., De Benedictis, S., Gorse, C. (1990). Problems in the Experimental Determination of Electron Energy Distribution Function in RF Discharges. In: Capitelli, M., Bardsley, J.N. (eds) Nonequilibrium Processes in Partially Ionized Gases. NATO ASI Series, vol 220. Springer, Boston, MA. https://doi.org/10.1007/978-1-4615-3780-9_34
Download citation
DOI: https://doi.org/10.1007/978-1-4615-3780-9_34
Publisher Name: Springer, Boston, MA
Print ISBN: 978-1-4613-6685-0
Online ISBN: 978-1-4615-3780-9
eBook Packages: Springer Book Archive